Matches in SemOpenAlex for { <https://semopenalex.org/work/W2031061489> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2031061489 endingPage "1573" @default.
- W2031061489 startingPage "1571" @default.
- W2031061489 abstract "We have analyzed the perturbations produced by recombination at surface, trapping at impurities, and stress fields on the room-temperature migration properties of point defects in Si. A stack consisting of a Si oxide (or a Si nitride) and a polycrystalline Si layer, deposited on Si samples, was patterned to open 2-μm-wide, 10-μm-spaced stripes. A 40-keV Si implantation to fluences of 1×1012–5×1013/cm3, performed through this mask at room temperature, was used to inject point defects into the bulk of the wafer. After implants, defect-induced dopant deactivation, in the cross section orthogonal to the direction of the stripes, has been monitored using two-dimensional spreading resistance profilometry. It has been found that, in highly pure epitaxial Si samples, dopant deactivation extends in depth to several microns beyond the region (∼0.4 μm) directly modified by the ions. Furthermore, the two-dimensional deactivation profiles exhibit a strong recess at the surface and a significant anisotropy, being markedly elongated in the lateral direction. Analysis of the data shows that long-range migration of defects is interrupted by trapping at impurities (C and O) or recombination at the surface, characterized by a coefficient of ∼100 μm−1. Moreover, the lateral elongation of the profiles is tentatively explained assuming an anisotropy in the defect diffusivity tensor produced by the strain field under the mask." @default.
- W2031061489 created "2016-06-24" @default.
- W2031061489 creator A5003019769 @default.
- W2031061489 creator A5005601798 @default.
- W2031061489 creator A5009799042 @default.
- W2031061489 creator A5016633667 @default.
- W2031061489 date "1998-09-14" @default.
- W2031061489 modified "2023-09-23" @default.
- W2031061489 title "Surface, stress, and impurity effects on room-temperature migration of ion-beam-generated point defects" @default.
- W2031061489 cites W1965058579 @default.
- W2031061489 cites W1981545888 @default.
- W2031061489 cites W1999457869 @default.
- W2031061489 cites W2005958227 @default.
- W2031061489 cites W2010033870 @default.
- W2031061489 cites W2022579164 @default.
- W2031061489 cites W2032205058 @default.
- W2031061489 cites W2045976589 @default.
- W2031061489 cites W2061278135 @default.
- W2031061489 cites W2080503531 @default.
- W2031061489 cites W2082197142 @default.
- W2031061489 cites W2145827319 @default.
- W2031061489 doi "https://doi.org/10.1063/1.122207" @default.
- W2031061489 hasPublicationYear "1998" @default.
- W2031061489 type Work @default.
- W2031061489 sameAs 2031061489 @default.
- W2031061489 citedByCount "5" @default.
- W2031061489 crossrefType "journal-article" @default.
- W2031061489 hasAuthorship W2031061489A5003019769 @default.
- W2031061489 hasAuthorship W2031061489A5005601798 @default.
- W2031061489 hasAuthorship W2031061489A5009799042 @default.
- W2031061489 hasAuthorship W2031061489A5016633667 @default.
- W2031061489 hasConcept C113196181 @default.
- W2031061489 hasConcept C120665830 @default.
- W2031061489 hasConcept C121332964 @default.
- W2031061489 hasConcept C137637335 @default.
- W2031061489 hasConcept C160671074 @default.
- W2031061489 hasConcept C164675345 @default.
- W2031061489 hasConcept C178790620 @default.
- W2031061489 hasConcept C185592680 @default.
- W2031061489 hasConcept C18903297 @default.
- W2031061489 hasConcept C191897082 @default.
- W2031061489 hasConcept C191952053 @default.
- W2031061489 hasConcept C192562407 @default.
- W2031061489 hasConcept C26873012 @default.
- W2031061489 hasConcept C2777924906 @default.
- W2031061489 hasConcept C41999313 @default.
- W2031061489 hasConcept C43617362 @default.
- W2031061489 hasConcept C49040817 @default.
- W2031061489 hasConcept C544956773 @default.
- W2031061489 hasConcept C57863236 @default.
- W2031061489 hasConcept C71987851 @default.
- W2031061489 hasConcept C8010536 @default.
- W2031061489 hasConcept C85725439 @default.
- W2031061489 hasConcept C86803240 @default.
- W2031061489 hasConceptScore W2031061489C113196181 @default.
- W2031061489 hasConceptScore W2031061489C120665830 @default.
- W2031061489 hasConceptScore W2031061489C121332964 @default.
- W2031061489 hasConceptScore W2031061489C137637335 @default.
- W2031061489 hasConceptScore W2031061489C160671074 @default.
- W2031061489 hasConceptScore W2031061489C164675345 @default.
- W2031061489 hasConceptScore W2031061489C178790620 @default.
- W2031061489 hasConceptScore W2031061489C185592680 @default.
- W2031061489 hasConceptScore W2031061489C18903297 @default.
- W2031061489 hasConceptScore W2031061489C191897082 @default.
- W2031061489 hasConceptScore W2031061489C191952053 @default.
- W2031061489 hasConceptScore W2031061489C192562407 @default.
- W2031061489 hasConceptScore W2031061489C26873012 @default.
- W2031061489 hasConceptScore W2031061489C2777924906 @default.
- W2031061489 hasConceptScore W2031061489C41999313 @default.
- W2031061489 hasConceptScore W2031061489C43617362 @default.
- W2031061489 hasConceptScore W2031061489C49040817 @default.
- W2031061489 hasConceptScore W2031061489C544956773 @default.
- W2031061489 hasConceptScore W2031061489C57863236 @default.
- W2031061489 hasConceptScore W2031061489C71987851 @default.
- W2031061489 hasConceptScore W2031061489C8010536 @default.
- W2031061489 hasConceptScore W2031061489C85725439 @default.
- W2031061489 hasConceptScore W2031061489C86803240 @default.
- W2031061489 hasIssue "11" @default.
- W2031061489 hasLocation W20310614891 @default.
- W2031061489 hasOpenAccess W2031061489 @default.
- W2031061489 hasPrimaryLocation W20310614891 @default.
- W2031061489 hasRelatedWork W1969716819 @default.
- W2031061489 hasRelatedWork W1982939544 @default.
- W2031061489 hasRelatedWork W1986979180 @default.
- W2031061489 hasRelatedWork W1998210601 @default.
- W2031061489 hasRelatedWork W2032781719 @default.
- W2031061489 hasRelatedWork W2066737639 @default.
- W2031061489 hasRelatedWork W2291232422 @default.
- W2031061489 hasRelatedWork W2531948254 @default.
- W2031061489 hasRelatedWork W2891071308 @default.
- W2031061489 hasRelatedWork W4214938698 @default.
- W2031061489 hasVolume "73" @default.
- W2031061489 isParatext "false" @default.
- W2031061489 isRetracted "false" @default.
- W2031061489 magId "2031061489" @default.
- W2031061489 workType "article" @default.