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• W2031140406 endingPage "035018" @default.
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• W2031140406 abstract "Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently developed mechanism that can produce fluid flow is an integrated ac-electro-osmosis micropump. However, like most electrokinetic pumps, ac-electro-osmotic pumps are incapable of handling backpressure as the pumping force mechanism acts on the surface of the fluid rather than the bulk. This paper presents a novel 3D electrode structure designed to overcome this limitation. The electrodes are fabricated using carbon-MEMS technology based on the pyrolysis of the photo-patternable polymer SU-8. The novel ac-electro-osmosis micropump shows an increase in the flow velocity compared to planar electrodes." @default.
• W2031140406 created "2016-06-24" @default.
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• W2031140406 date "2011-02-17" @default.
• W2031140406 modified "2023-09-27" @default.
• W2031140406 title "Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8" @default.
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• W2031140406 doi "https://doi.org/10.1088/0960-1317/21/3/035018" @default.
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