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- W2031168458 abstract "We introduced atomic hydrogen (H) into a solid source molecular beam epitaxy (MBE) machine and investigated its adsorption and desorption on Si(001) and its influence on Si MBE. Reflection high-energy electron diffraction intensity evolution caused by H adsorption and desorption was observed and was analyzed to understand the interaction of H with Si(001) surfaces. It was also confirmed that the H suppressed the surface migration of Si atoms, whose influence is similar to that of group V elements that are known to be effective surfactants." @default.
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- W2031168458 date "1995-12-01" @default.
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- W2031168458 title "Adsorption and desorption of atomic hydrogen on Si(001) and its effects on Si MBE" @default.
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- W2031168458 doi "https://doi.org/10.1016/0022-0248(95)00327-4" @default.
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