Matches in SemOpenAlex for { <https://semopenalex.org/work/W2031181593> ?p ?o ?g. }
Showing items 1 to 64 of
64
with 100 items per page.
- W2031181593 endingPage "664" @default.
- W2031181593 startingPage "661" @default.
- W2031181593 abstract "Abstract A new sputtering film deposition technique using a metal-oxide combined target is described. It is possible to deposit oxide film in metallic mode. Perovskite Pb(Zr,Ti)O 3 films were prepared by using Zr,Ti+PbO combined target and introducing a small amount of oxygen gas (O 2 /Ar=2.1%) at substrate temperature as low as 450°C. The deposition rate was around 15 nm/min. In this sputtering process, oxygen atoms in the deposited films were cleared to be supplied mainly from PbO pellets." @default.
- W2031181593 created "2016-06-24" @default.
- W2031181593 creator A5057519159 @default.
- W2031181593 creator A5075420892 @default.
- W2031181593 creator A5077964650 @default.
- W2031181593 date "1998-12-01" @default.
- W2031181593 modified "2023-09-26" @default.
- W2031181593 title "Origin of oxygen in Pb(Zr,Ti)O3 films prepared by metal-oxide combined target" @default.
- W2031181593 cites W1972733128 @default.
- W2031181593 cites W1975493213 @default.
- W2031181593 cites W2004612084 @default.
- W2031181593 cites W2040537365 @default.
- W2031181593 cites W2077707088 @default.
- W2031181593 cites W2112702072 @default.
- W2031181593 doi "https://doi.org/10.1016/s0042-207x(98)00269-3" @default.
- W2031181593 hasPublicationYear "1998" @default.
- W2031181593 type Work @default.
- W2031181593 sameAs 2031181593 @default.
- W2031181593 citedByCount "2" @default.
- W2031181593 crossrefType "journal-article" @default.
- W2031181593 hasAuthorship W2031181593A5057519159 @default.
- W2031181593 hasAuthorship W2031181593A5075420892 @default.
- W2031181593 hasAuthorship W2031181593A5077964650 @default.
- W2031181593 hasConcept C127413603 @default.
- W2031181593 hasConcept C178790620 @default.
- W2031181593 hasConcept C179104552 @default.
- W2031181593 hasConcept C185592680 @default.
- W2031181593 hasConcept C191897082 @default.
- W2031181593 hasConcept C192562407 @default.
- W2031181593 hasConcept C2779851234 @default.
- W2031181593 hasConcept C42360764 @default.
- W2031181593 hasConcept C540031477 @default.
- W2031181593 hasConcept C544153396 @default.
- W2031181593 hasConceptScore W2031181593C127413603 @default.
- W2031181593 hasConceptScore W2031181593C178790620 @default.
- W2031181593 hasConceptScore W2031181593C179104552 @default.
- W2031181593 hasConceptScore W2031181593C185592680 @default.
- W2031181593 hasConceptScore W2031181593C191897082 @default.
- W2031181593 hasConceptScore W2031181593C192562407 @default.
- W2031181593 hasConceptScore W2031181593C2779851234 @default.
- W2031181593 hasConceptScore W2031181593C42360764 @default.
- W2031181593 hasConceptScore W2031181593C540031477 @default.
- W2031181593 hasConceptScore W2031181593C544153396 @default.
- W2031181593 hasIssue "4" @default.
- W2031181593 hasLocation W20311815931 @default.
- W2031181593 hasOpenAccess W2031181593 @default.
- W2031181593 hasPrimaryLocation W20311815931 @default.
- W2031181593 hasRelatedWork W1570483242 @default.
- W2031181593 hasRelatedWork W1982215539 @default.
- W2031181593 hasRelatedWork W2020625561 @default.
- W2031181593 hasRelatedWork W203860709 @default.
- W2031181593 hasRelatedWork W2188427199 @default.
- W2031181593 hasRelatedWork W2261929604 @default.
- W2031181593 hasRelatedWork W2620331613 @default.
- W2031181593 hasRelatedWork W2950830950 @default.
- W2031181593 hasRelatedWork W3024421643 @default.
- W2031181593 hasRelatedWork W4200166121 @default.
- W2031181593 hasVolume "51" @default.
- W2031181593 isParatext "false" @default.
- W2031181593 isRetracted "false" @default.
- W2031181593 magId "2031181593" @default.
- W2031181593 workType "article" @default.