Matches in SemOpenAlex for { <https://semopenalex.org/work/W2031195655> ?p ?o ?g. }
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- W2031195655 endingPage "6650" @default.
- W2031195655 startingPage "6642" @default.
- W2031195655 abstract "Plasma immersion ion implantation was used to implant oxygen ions into silicon with applied voltage pulses of −40 kV and 2.5 μs length. Positive ions, O2+ and O+, with a continuous energy distribution between 0 and 40 keV were implanted. Between 3×104 and 3×105 pulses, corresponding to nominal doses from 2×1016 to 2×1017/cm2, were used. The resulting oxygen depth profiles were measured with elastic recoil detection analysis using 13.4 MeV α particles. Rutherford backscattering was used to determine possible co-implanted contaminants. The obtained depth profiles were simulated using a linear superposition of calculated single-energy profiles. The results obtained for the energy distribution of the incident ions are compared with calculations obtained from a theoretical model, and the agreement is very good. The incident flux is found to be composed of 34(5)% O2+ and 66(5)% O+ ions with an Fe contamination of ∼0.5%." @default.
- W2031195655 created "2016-06-24" @default.
- W2031195655 creator A5011224041 @default.
- W2031195655 creator A5045015959 @default.
- W2031195655 creator A5065244868 @default.
- W2031195655 creator A5066604406 @default.
- W2031195655 date "1997-05-15" @default.
- W2031195655 modified "2023-09-25" @default.
- W2031195655 title "Alpha-elastic recoil detection analysis of the energy distribution of oxygen ions implanted into silicon with plasma immersion ion implantation" @default.
- W2031195655 cites W1976342244 @default.
- W2031195655 cites W1981536510 @default.
- W2031195655 cites W1981563088 @default.
- W2031195655 cites W1984328175 @default.
- W2031195655 cites W1988514244 @default.
- W2031195655 cites W2006931422 @default.
- W2031195655 cites W2015152650 @default.
- W2031195655 cites W2016253537 @default.
- W2031195655 cites W2016925359 @default.
- W2031195655 cites W2024663233 @default.
- W2031195655 cites W2026453848 @default.
- W2031195655 cites W2028589396 @default.
- W2031195655 cites W2030516202 @default.
- W2031195655 cites W2034698592 @default.
- W2031195655 cites W2035581207 @default.
- W2031195655 cites W2042399432 @default.
- W2031195655 cites W2064414171 @default.
- W2031195655 cites W2073539035 @default.
- W2031195655 cites W2078449894 @default.
- W2031195655 cites W2083543571 @default.
- W2031195655 cites W2090009800 @default.
- W2031195655 cites W2131099000 @default.
- W2031195655 doi "https://doi.org/10.1063/1.365203" @default.
- W2031195655 hasPublicationYear "1997" @default.
- W2031195655 type Work @default.
- W2031195655 sameAs 2031195655 @default.
- W2031195655 citedByCount "9" @default.
- W2031195655 countsByYear W20311956552018 @default.
- W2031195655 crossrefType "journal-article" @default.
- W2031195655 hasAuthorship W2031195655A5011224041 @default.
- W2031195655 hasAuthorship W2031195655A5045015959 @default.
- W2031195655 hasAuthorship W2031195655A5065244868 @default.
- W2031195655 hasAuthorship W2031195655A5066604406 @default.
- W2031195655 hasConcept C113196181 @default.
- W2031195655 hasConcept C121332964 @default.
- W2031195655 hasConcept C145148216 @default.
- W2031195655 hasConcept C178790620 @default.
- W2031195655 hasConcept C184779094 @default.
- W2031195655 hasConcept C185544564 @default.
- W2031195655 hasConcept C185592680 @default.
- W2031195655 hasConcept C192562407 @default.
- W2031195655 hasConcept C2776523803 @default.
- W2031195655 hasConcept C2776668124 @default.
- W2031195655 hasConcept C2778702798 @default.
- W2031195655 hasConcept C41823505 @default.
- W2031195655 hasConcept C43617362 @default.
- W2031195655 hasConcept C49040817 @default.
- W2031195655 hasConcept C540031477 @default.
- W2031195655 hasConcept C544956773 @default.
- W2031195655 hasConcept C82706917 @default.
- W2031195655 hasConceptScore W2031195655C113196181 @default.
- W2031195655 hasConceptScore W2031195655C121332964 @default.
- W2031195655 hasConceptScore W2031195655C145148216 @default.
- W2031195655 hasConceptScore W2031195655C178790620 @default.
- W2031195655 hasConceptScore W2031195655C184779094 @default.
- W2031195655 hasConceptScore W2031195655C185544564 @default.
- W2031195655 hasConceptScore W2031195655C185592680 @default.
- W2031195655 hasConceptScore W2031195655C192562407 @default.
- W2031195655 hasConceptScore W2031195655C2776523803 @default.
- W2031195655 hasConceptScore W2031195655C2776668124 @default.
- W2031195655 hasConceptScore W2031195655C2778702798 @default.
- W2031195655 hasConceptScore W2031195655C41823505 @default.
- W2031195655 hasConceptScore W2031195655C43617362 @default.
- W2031195655 hasConceptScore W2031195655C49040817 @default.
- W2031195655 hasConceptScore W2031195655C540031477 @default.
- W2031195655 hasConceptScore W2031195655C544956773 @default.
- W2031195655 hasConceptScore W2031195655C82706917 @default.
- W2031195655 hasIssue "10" @default.
- W2031195655 hasLocation W20311956551 @default.
- W2031195655 hasOpenAccess W2031195655 @default.
- W2031195655 hasPrimaryLocation W20311956551 @default.
- W2031195655 hasRelatedWork W1982778133 @default.
- W2031195655 hasRelatedWork W2024127000 @default.
- W2031195655 hasRelatedWork W2031195655 @default.
- W2031195655 hasRelatedWork W2072261858 @default.
- W2031195655 hasRelatedWork W2077672766 @default.
- W2031195655 hasRelatedWork W2091949762 @default.
- W2031195655 hasRelatedWork W2365882335 @default.
- W2031195655 hasRelatedWork W4211087954 @default.
- W2031195655 hasRelatedWork W4362663149 @default.
- W2031195655 hasRelatedWork W2083108293 @default.
- W2031195655 hasVolume "81" @default.
- W2031195655 isParatext "false" @default.
- W2031195655 isRetracted "false" @default.
- W2031195655 magId "2031195655" @default.
- W2031195655 workType "article" @default.