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- W2031223917 endingPage "1940" @default.
- W2031223917 startingPage "1940" @default.
- W2031223917 abstract "A precision alignment technique is developed. We combined a moire and a differential amplifier to align two Ronchi rulings with high accuracy. The precision of this technique can reach submicron level if higher spatial frequency of the ruling is used." @default.
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- W2031223917 date "1992-06-01" @default.
- W2031223917 modified "2023-09-28" @default.
- W2031223917 title "A Precision Alignment with Moire Technique and Differential Amplifier" @default.
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- W2031223917 doi "https://doi.org/10.1143/jjap.31.1940" @default.
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