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• W2031264071 abstract "Negative tone resists based on cross-linking via epoxide/cationic polymerization have a variety of potential advantages over more traditional positive tone resists based on photoacid catalyzed deprotection including low outgassing, intrinsic diffusion control, and improved pattern collapse performance through the higher modulus provided by a cross-linked network. Based on the promising baseline performance achieved previously in simple negative tone systems composed only of an epoxide functionalized molecular glass and a photoacid generator, a series of different methods and additives that can be used to control the extent and rate of cross-linking in such systems have been developed and are reported here which allow for even further improvement in resist performance. Simple addition of base quencher, as is used in conventional chemically amplified resists, is ineffective in these systems because the patterning reaction mechanism is different. Any control method must work by modifying the extent and rate of cationic polymerization of epoxides. By adding molecules containing phenolic OH groups to such an epoxide resist, one can slow the extent of cross-linking due to introduction of an additional reaction pathway and often a concomitant increase in the resist resin glass transition temperature. Generalized additives similar to base quencher were also developed based on the addition of strong nucleophiles such as triphenylphosphine which act essentially as chain termination agents. This approach allows for improved resolution and LER in negative tone epoxide resist systems. A more superior additive was developed that can be described as a photodecomposable nucleophile (PDN). The unexposed PDN acts similarly to the strong nucleophile additives in that it terminates chain propagation. Upon exposure, the PDN can act like a chain transfer agent or an additional initiator, but no longer has the effect of completely terminating chain propagation. This approach allows for high levels of control in the nominally unexposed regions of the resist, but maintains high efficiency of cross-linking in the most highly exposed regions. One particular implementation of a PDN used in this study is the blending of a PAG (i.e. triphenylsulfonium triflate, TPS-Tf) with a more nucleophilic anion that plays the role of a PDN, with the common and highly effective, non-nucleophilic PAG that is conventionally used in epoxide photopolymerizations (i.e. triphenylsulfonium hexafluoroantimonate, TPS-SbF₆). Addition of only a few percent of TPS-Tf to a baseline epoxide resist formulation shows a 5-10 nm improvement in ultimate resolution and a reduction in LER to around 65% as compared to the baseline resist without the PDN additive while only incurring a moderate increase in imaging dose. By modulating the amount of the different polymerization control additives, the performance of a particular epoxide resist was improved from a resolution of greater than 30 nm half pitch and an LER of around 9 nm to a resolution of ~20 nm half pitch, with an LER of around 4 nm, and a sensitivity of 18 mJ/cm². By increasing the additive loading even further, the resolution was improved to ~18 nm half pitch, although with an increase in imaging dose to 39 mJ/cm2." @default.
• W2031264071 created "2016-06-24" @default.
• W2031264071 creator A5010046244 @default.
• W2031264071 creator A5027096922 @default.
• W2031264071 creator A5059167082 @default.
• W2031264071 creator A5059379711 @default.
• W2031264071 creator A5079783999 @default.
• W2031264071 date "2014-03-27" @default.
• W2031264071 modified "2023-09-25" @default.
• W2031264071 title "Methods of controlling cross-linking in negative-tone resists" @default.
• W2031264071 cites W1967747853 @default.
• W2031264071 cites W1971944808 @default.
• W2031264071 cites W1990284496 @default.
• W2031264071 cites W1991475464 @default.
• W2031264071 cites W1991975839 @default.
• W2031264071 cites W2016191561 @default.
• W2031264071 cites W2035237992 @default.
• W2031264071 cites W2058478776 @default.
• W2031264071 cites W2071437586 @default.
• W2031264071 cites W2120449835 @default.
• W2031264071 cites W2141075684 @default.
• W2031264071 cites W2142507821 @default.
• W2031264071 cites W4232740282 @default.
• W2031264071 cites W4256335425 @default.
• W2031264071 cites W617878254 @default.
• W2031264071 doi "https://doi.org/10.1117/12.2046616" @default.
• W2031264071 hasPublicationYear "2014" @default.
• W2031264071 type Work @default.
• W2031264071 sameAs 2031264071 @default.
• W2031264071 citedByCount "6" @default.
• W2031264071 countsByYear W20312640712016 @default.
• W2031264071 countsByYear W20312640712017 @default.
• W2031264071 countsByYear W20312640712018 @default.
• W2031264071 countsByYear W20312640712019 @default.
• W2031264071 countsByYear W20312640712023 @default.
• W2031264071 crossrefType "proceedings-article" @default.
• W2031264071 hasAuthorship W2031264071A5010046244 @default.
• W2031264071 hasAuthorship W2031264071A5027096922 @default.
• W2031264071 hasAuthorship W2031264071A5059167082 @default.
• W2031264071 hasAuthorship W2031264071A5059379711 @default.
• W2031264071 hasAuthorship W2031264071A5079783999 @default.
• W2031264071 hasConcept C134406635 @default.
• W2031264071 hasConcept C159985019 @default.
• W2031264071 hasConcept C161790260 @default.
• W2031264071 hasConcept C171250308 @default.
• W2031264071 hasConcept C178790620 @default.
• W2031264071 hasConcept C178907741 @default.
• W2031264071 hasConcept C183882617 @default.
• W2031264071 hasConcept C185592680 @default.
• W2031264071 hasConcept C188027245 @default.
• W2031264071 hasConcept C192562407 @default.
• W2031264071 hasConcept C2776920199 @default.
• W2031264071 hasConcept C2779227376 @default.
• W2031264071 hasConcept C44228677 @default.
• W2031264071 hasConcept C521977710 @default.
• W2031264071 hasConcept C53524968 @default.
• W2031264071 hasConcept C75473681 @default.
• W2031264071 hasConceptScore W2031264071C134406635 @default.
• W2031264071 hasConceptScore W2031264071C159985019 @default.
• W2031264071 hasConceptScore W2031264071C161790260 @default.
• W2031264071 hasConceptScore W2031264071C171250308 @default.
• W2031264071 hasConceptScore W2031264071C178790620 @default.
• W2031264071 hasConceptScore W2031264071C178907741 @default.
• W2031264071 hasConceptScore W2031264071C183882617 @default.
• W2031264071 hasConceptScore W2031264071C185592680 @default.
• W2031264071 hasConceptScore W2031264071C188027245 @default.
• W2031264071 hasConceptScore W2031264071C192562407 @default.
• W2031264071 hasConceptScore W2031264071C2776920199 @default.
• W2031264071 hasConceptScore W2031264071C2779227376 @default.
• W2031264071 hasConceptScore W2031264071C44228677 @default.
• W2031264071 hasConceptScore W2031264071C521977710 @default.
• W2031264071 hasConceptScore W2031264071C53524968 @default.
• W2031264071 hasConceptScore W2031264071C75473681 @default.
• W2031264071 hasLocation W20312640711 @default.
• W2031264071 hasOpenAccess W2031264071 @default.
• W2031264071 hasPrimaryLocation W20312640711 @default.
• W2031264071 hasRelatedWork W1980236686 @default.
• W2031264071 hasRelatedWork W1990950348 @default.
• W2031264071 hasRelatedWork W2045098484 @default.
• W2031264071 hasRelatedWork W2073116395 @default.
• W2031264071 hasRelatedWork W2080028491 @default.
• W2031264071 hasRelatedWork W2352688697 @default.
• W2031264071 hasRelatedWork W2382665803 @default.
• W2031264071 hasRelatedWork W2899084033 @default.
• W2031264071 hasRelatedWork W2920584510 @default.
• W2031264071 hasRelatedWork W4242168368 @default.
• W2031264071 isParatext "false" @default.
• W2031264071 isRetracted "false" @default.
• W2031264071 magId "2031264071" @default.
• W2031264071 workType "article" @default.