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- W2031491935 abstract "Abstract Ellipsometric measurements coupled with efficient theoretical modeling are used to determine the size and distribution density of Au nanoparticles on a multilayer film. The rigorous coupled‐wave analysis (RCWA) and finiteelement Green's function method were used to model the polarization‐dependent reflectivity, and the model calculations are in reasonable agreement with the measurements. This demonstrates that the spectroscopic ellipsometry could be a useful optical tool for nondestructive nanometrology. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
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- W2031491935 date "2008-05-01" @default.
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- W2031491935 title "Optical nanometrology of Au nanoparticles on a multilayer film" @default.
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- W2031491935 doi "https://doi.org/10.1002/pssc.200777834" @default.
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