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• W2031546875 abstract "The decomposition of Fe(CO)5 to produce Fe films on Si(100) has been examined in situ using Auger electron spectroscopy. Processes occurring during pyrolytic, UV photolytic and electron beam deposition are determined. The nature of the surface films produced by these different methods is compared and contrasted." @default.
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• W2031546875 date "1984-11-01" @default.
• W2031546875 modified "2023-09-26" @default.
• W2031546875 title "Chemical vapour deposition on silicon: In situ surface studies" @default.
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• W2031546875 doi "https://doi.org/10.1016/0009-2614(84)85020-4" @default.
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