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- W2031569499 abstract "In this work, we implanted B+, O+, Al+, and P+ ions into ZnO with energy of 50-380 keV and total doses of 4 × 1015 cm–2 for each ion. The implantation-induced defects and their thermal recovery were studied using a slow positron beam. Vacancy clusters are produced in all the implanted samples. It is found that the thermal recovery of these vacancies induced by different ions shows much difference. In case of B+ and Al+-implantation, the vacancy clusters agglomerate to much larger size and might evolve to microvoids during annealing. However, for O+ and P+ ions, which are heavier than B+ and Al+, the vacancies show a much weaker agglomeration process. The mechanism of such difference is discussed. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
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- W2031569499 date "2007-09-01" @default.
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- W2031569499 title "Ion species dependence of the implantation-induced defects in ZnO studied by a slow positron beam" @default.
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- W2031569499 doi "https://doi.org/10.1002/pssc.200775793" @default.
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