Matches in SemOpenAlex for { <https://semopenalex.org/work/W2031599899> ?p ?o ?g. }
Showing items 1 to 64 of
64
with 100 items per page.
- W2031599899 abstract "A compact device, based on fast capillary discharge plasmas, is an intense EUV and soft x-ray source of radiation. Th plasma is created by a discharge of low-inductance capacitors through a gas-filled ceramic capillary. Parameters of the discharge are: maximum current of 25 kA at applied voltage 40 kV, a pulse duration of 20-30 ns at FWHM, and a rise time of 1.5 ns. The soft x-ray and EUV emission of multiply charged ions is investigated using a compact 1 meter grazing incidence spectrometer-monochromator with a constant angle of deviation. The use of various gases allows the observation of XUV spectra in a wide spectral range (4- 45 nm). A Xe-filled capillary discharge shows intense radiation near 13.5 nm - the region of interest for EUV lithography applications. A reflectometer is used for testing grazing incidence gratings." @default.
- W2031599899 created "2016-06-24" @default.
- W2031599899 creator A5012816986 @default.
- W2031599899 creator A5015234876 @default.
- W2031599899 creator A5043159124 @default.
- W2031599899 creator A5060513815 @default.
- W2031599899 date "2001-11-14" @default.
- W2031599899 modified "2023-10-14" @default.
- W2031599899 title "<title>Intense XUV source of radiation within the 4- to 45-nm spectral range based on capillary discharge plasmas</title>" @default.
- W2031599899 doi "https://doi.org/10.1117/12.448459" @default.
- W2031599899 hasPublicationYear "2001" @default.
- W2031599899 type Work @default.
- W2031599899 sameAs 2031599899 @default.
- W2031599899 citedByCount "5" @default.
- W2031599899 countsByYear W20315998992017 @default.
- W2031599899 countsByYear W20315998992018 @default.
- W2031599899 crossrefType "proceedings-article" @default.
- W2031599899 hasAuthorship W2031599899A5012816986 @default.
- W2031599899 hasAuthorship W2031599899A5015234876 @default.
- W2031599899 hasAuthorship W2031599899A5043159124 @default.
- W2031599899 hasAuthorship W2031599899A5060513815 @default.
- W2031599899 hasConcept C120665830 @default.
- W2031599899 hasConcept C121332964 @default.
- W2031599899 hasConcept C14112920 @default.
- W2031599899 hasConcept C146024833 @default.
- W2031599899 hasConcept C153385146 @default.
- W2031599899 hasConcept C162996421 @default.
- W2031599899 hasConcept C184779094 @default.
- W2031599899 hasConcept C192562407 @default.
- W2031599899 hasConcept C33390570 @default.
- W2031599899 hasConcept C520434653 @default.
- W2031599899 hasConcept C62520636 @default.
- W2031599899 hasConcept C6260449 @default.
- W2031599899 hasConcept C82706917 @default.
- W2031599899 hasConceptScore W2031599899C120665830 @default.
- W2031599899 hasConceptScore W2031599899C121332964 @default.
- W2031599899 hasConceptScore W2031599899C14112920 @default.
- W2031599899 hasConceptScore W2031599899C146024833 @default.
- W2031599899 hasConceptScore W2031599899C153385146 @default.
- W2031599899 hasConceptScore W2031599899C162996421 @default.
- W2031599899 hasConceptScore W2031599899C184779094 @default.
- W2031599899 hasConceptScore W2031599899C192562407 @default.
- W2031599899 hasConceptScore W2031599899C33390570 @default.
- W2031599899 hasConceptScore W2031599899C520434653 @default.
- W2031599899 hasConceptScore W2031599899C62520636 @default.
- W2031599899 hasConceptScore W2031599899C6260449 @default.
- W2031599899 hasConceptScore W2031599899C82706917 @default.
- W2031599899 hasLocation W20315998991 @default.
- W2031599899 hasOpenAccess W2031599899 @default.
- W2031599899 hasPrimaryLocation W20315998991 @default.
- W2031599899 hasRelatedWork W1886155521 @default.
- W2031599899 hasRelatedWork W20135094 @default.
- W2031599899 hasRelatedWork W2022750877 @default.
- W2031599899 hasRelatedWork W2056066680 @default.
- W2031599899 hasRelatedWork W2073230376 @default.
- W2031599899 hasRelatedWork W2369662583 @default.
- W2031599899 hasRelatedWork W2389376840 @default.
- W2031599899 hasRelatedWork W2788885654 @default.
- W2031599899 hasRelatedWork W3006789428 @default.
- W2031599899 hasRelatedWork W3037224931 @default.
- W2031599899 isParatext "false" @default.
- W2031599899 isRetracted "false" @default.
- W2031599899 magId "2031599899" @default.
- W2031599899 workType "article" @default.