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- W2031604865 endingPage "217" @default.
- W2031604865 startingPage "209" @default.
- W2031604865 abstract "Aluminum nitride and gallium nitride films have been grown on the 1120, 0001, 1010, and 1102 (A, C, M, and R, respectively) planes of sapphire by laser photochemical vapor deposition and MOCVD at temperatures ranging from 600 to 950°C and a total reactor pressure of 1–5 Torr. For the molecular precursors triethylgallium (TEGa) and ammonia. GaN film growth directly onto sapphire or on AIN buffer layers ranging from ∼50 to 500 Å in thickness has been investigated under conventional MOCVD growth conditions and compared to the growth rates and structure for films produced when 193 and 248 nm (ArF, hω = 6.4eV, and KrF, hω = 5.0eV, respectively) photons are introduced into the reactor. Kinetic modeling of the growth rate dependence on laser pulse energy suggests that the dominant photolytically produced species is the amidogen radical, NH2. The presence of 193 nm photons also promotes the growth of (1120)-oriented GaN films, which provides an example of the ability of photochemistry in the gas phase to drive surface kinetics." @default.
- W2031604865 created "2016-06-24" @default.
- W2031604865 creator A5016648738 @default.
- W2031604865 creator A5028351353 @default.
- W2031604865 date "1997-08-01" @default.
- W2031604865 modified "2023-09-25" @default.
- W2031604865 title "Photochemical Vapor Deposition of Wide Bandgap III-V Materials: Influence of Photochemically Generated Radicals on the Growth of Aluminum Nitride and Gallium Nitride Films" @default.
- W2031604865 cites W1965196557 @default.
- W2031604865 cites W1968904686 @default.
- W2031604865 cites W1977433303 @default.
- W2031604865 cites W2003081477 @default.
- W2031604865 cites W2007930532 @default.
- W2031604865 cites W2013582063 @default.
- W2031604865 cites W2017625189 @default.
- W2031604865 cites W2020964689 @default.
- W2031604865 cites W2028449799 @default.
- W2031604865 cites W2042916342 @default.
- W2031604865 cites W2051482472 @default.
- W2031604865 cites W2054227182 @default.
- W2031604865 cites W2059157055 @default.
- W2031604865 cites W2089577710 @default.
- W2031604865 cites W2257995280 @default.
- W2031604865 cites W2951432739 @default.
- W2031604865 doi "https://doi.org/10.1002/cvde.19970030409" @default.
- W2031604865 hasPublicationYear "1997" @default.
- W2031604865 type Work @default.
- W2031604865 sameAs 2031604865 @default.
- W2031604865 citedByCount "7" @default.
- W2031604865 crossrefType "journal-article" @default.
- W2031604865 hasAuthorship W2031604865A5016648738 @default.
- W2031604865 hasAuthorship W2031604865A5028351353 @default.
- W2031604865 hasConcept C110738630 @default.
- W2031604865 hasConcept C113196181 @default.
- W2031604865 hasConcept C120665830 @default.
- W2031604865 hasConcept C121332964 @default.
- W2031604865 hasConcept C171250308 @default.
- W2031604865 hasConcept C175665537 @default.
- W2031604865 hasConcept C178790620 @default.
- W2031604865 hasConcept C181966813 @default.
- W2031604865 hasConcept C185592680 @default.
- W2031604865 hasConcept C19067145 @default.
- W2031604865 hasConcept C192562407 @default.
- W2031604865 hasConcept C194760766 @default.
- W2031604865 hasConcept C2778871202 @default.
- W2031604865 hasConcept C2779227376 @default.
- W2031604865 hasConcept C2780064504 @default.
- W2031604865 hasConcept C2780464664 @default.
- W2031604865 hasConcept C37982897 @default.
- W2031604865 hasConcept C49040817 @default.
- W2031604865 hasConcept C520434653 @default.
- W2031604865 hasConcept C57410435 @default.
- W2031604865 hasConcept C75473681 @default.
- W2031604865 hasConceptScore W2031604865C110738630 @default.
- W2031604865 hasConceptScore W2031604865C113196181 @default.
- W2031604865 hasConceptScore W2031604865C120665830 @default.
- W2031604865 hasConceptScore W2031604865C121332964 @default.
- W2031604865 hasConceptScore W2031604865C171250308 @default.
- W2031604865 hasConceptScore W2031604865C175665537 @default.
- W2031604865 hasConceptScore W2031604865C178790620 @default.
- W2031604865 hasConceptScore W2031604865C181966813 @default.
- W2031604865 hasConceptScore W2031604865C185592680 @default.
- W2031604865 hasConceptScore W2031604865C19067145 @default.
- W2031604865 hasConceptScore W2031604865C192562407 @default.
- W2031604865 hasConceptScore W2031604865C194760766 @default.
- W2031604865 hasConceptScore W2031604865C2778871202 @default.
- W2031604865 hasConceptScore W2031604865C2779227376 @default.
- W2031604865 hasConceptScore W2031604865C2780064504 @default.
- W2031604865 hasConceptScore W2031604865C2780464664 @default.
- W2031604865 hasConceptScore W2031604865C37982897 @default.
- W2031604865 hasConceptScore W2031604865C49040817 @default.
- W2031604865 hasConceptScore W2031604865C520434653 @default.
- W2031604865 hasConceptScore W2031604865C57410435 @default.
- W2031604865 hasConceptScore W2031604865C75473681 @default.
- W2031604865 hasIssue "4" @default.
- W2031604865 hasLocation W20316048651 @default.
- W2031604865 hasOpenAccess W2031604865 @default.
- W2031604865 hasPrimaryLocation W20316048651 @default.
- W2031604865 hasRelatedWork W1656978955 @default.
- W2031604865 hasRelatedWork W1985026985 @default.
- W2031604865 hasRelatedWork W2061145372 @default.
- W2031604865 hasRelatedWork W2062864938 @default.
- W2031604865 hasRelatedWork W2093458440 @default.
- W2031604865 hasRelatedWork W2116415432 @default.
- W2031604865 hasRelatedWork W2132326141 @default.
- W2031604865 hasRelatedWork W2174347408 @default.
- W2031604865 hasRelatedWork W2540990233 @default.
- W2031604865 hasRelatedWork W3008646572 @default.
- W2031604865 hasVolume "3" @default.
- W2031604865 isParatext "false" @default.
- W2031604865 isRetracted "false" @default.
- W2031604865 magId "2031604865" @default.
- W2031604865 workType "article" @default.