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- W2031614707 endingPage "512" @default.
- W2031614707 startingPage "507" @default.
- W2031614707 abstract "Using mixed alkali which is mixed by inorganic base and organic base and potassium carbonate can prepare non-spherical colloidal silica and the two types of colloidal silica are well used in chemical mechanical polishing of silicon substrate surface. A lot of chemical mechanical polishing tests about the non-spherical colloidal silica have proved that non spherical colloidal silica which the particle size is about 50 nm can be used in chemical mechanical polishing whose removal rate is faster than 130nm spherical colloidal silica around 10%." @default.
- W2031614707 created "2016-06-24" @default.
- W2031614707 creator A5058361424 @default.
- W2031614707 creator A5082529659 @default.
- W2031614707 date "2013-03-08" @default.
- W2031614707 modified "2023-09-26" @default.
- W2031614707 title "The Preparation of Nanometer Non Spherical Colloidal Silica and Its Polishing Character" @default.
- W2031614707 doi "https://doi.org/10.1149/05201.0507ecst" @default.
- W2031614707 hasPublicationYear "2013" @default.
- W2031614707 type Work @default.
- W2031614707 sameAs 2031614707 @default.
- W2031614707 citedByCount "3" @default.
- W2031614707 countsByYear W20316147072018 @default.
- W2031614707 countsByYear W20316147072019 @default.
- W2031614707 crossrefType "journal-article" @default.
- W2031614707 hasAuthorship W2031614707A5058361424 @default.
- W2031614707 hasAuthorship W2031614707A5082529659 @default.
- W2031614707 hasConcept C111368507 @default.
- W2031614707 hasConcept C127313418 @default.
- W2031614707 hasConcept C127413603 @default.
- W2031614707 hasConcept C138113353 @default.
- W2031614707 hasConcept C159985019 @default.
- W2031614707 hasConcept C171250308 @default.
- W2031614707 hasConcept C180088628 @default.
- W2031614707 hasConcept C185592680 @default.
- W2031614707 hasConcept C187530423 @default.
- W2031614707 hasConcept C191897082 @default.
- W2031614707 hasConcept C192562407 @default.
- W2031614707 hasConcept C197445215 @default.
- W2031614707 hasConcept C199289684 @default.
- W2031614707 hasConcept C2776685566 @default.
- W2031614707 hasConcept C2778024142 @default.
- W2031614707 hasConcept C2778517922 @default.
- W2031614707 hasConcept C2779947509 @default.
- W2031614707 hasConcept C2781448156 @default.
- W2031614707 hasConcept C42360764 @default.
- W2031614707 hasConcept C544956773 @default.
- W2031614707 hasConcept C59789625 @default.
- W2031614707 hasConcept C77066764 @default.
- W2031614707 hasConceptScore W2031614707C111368507 @default.
- W2031614707 hasConceptScore W2031614707C127313418 @default.
- W2031614707 hasConceptScore W2031614707C127413603 @default.
- W2031614707 hasConceptScore W2031614707C138113353 @default.
- W2031614707 hasConceptScore W2031614707C159985019 @default.
- W2031614707 hasConceptScore W2031614707C171250308 @default.
- W2031614707 hasConceptScore W2031614707C180088628 @default.
- W2031614707 hasConceptScore W2031614707C185592680 @default.
- W2031614707 hasConceptScore W2031614707C187530423 @default.
- W2031614707 hasConceptScore W2031614707C191897082 @default.
- W2031614707 hasConceptScore W2031614707C192562407 @default.
- W2031614707 hasConceptScore W2031614707C197445215 @default.
- W2031614707 hasConceptScore W2031614707C199289684 @default.
- W2031614707 hasConceptScore W2031614707C2776685566 @default.
- W2031614707 hasConceptScore W2031614707C2778024142 @default.
- W2031614707 hasConceptScore W2031614707C2778517922 @default.
- W2031614707 hasConceptScore W2031614707C2779947509 @default.
- W2031614707 hasConceptScore W2031614707C2781448156 @default.
- W2031614707 hasConceptScore W2031614707C42360764 @default.
- W2031614707 hasConceptScore W2031614707C544956773 @default.
- W2031614707 hasConceptScore W2031614707C59789625 @default.
- W2031614707 hasConceptScore W2031614707C77066764 @default.
- W2031614707 hasIssue "1" @default.
- W2031614707 hasLocation W20316147071 @default.
- W2031614707 hasOpenAccess W2031614707 @default.
- W2031614707 hasPrimaryLocation W20316147071 @default.
- W2031614707 hasRelatedWork W170851703 @default.
- W2031614707 hasRelatedWork W1995628238 @default.
- W2031614707 hasRelatedWork W2026231372 @default.
- W2031614707 hasRelatedWork W2108571476 @default.
- W2031614707 hasRelatedWork W2147352784 @default.
- W2031614707 hasRelatedWork W2471458111 @default.
- W2031614707 hasRelatedWork W2806265988 @default.
- W2031614707 hasRelatedWork W2921131276 @default.
- W2031614707 hasRelatedWork W3115843572 @default.
- W2031614707 hasRelatedWork W95866263 @default.
- W2031614707 hasVolume "52" @default.
- W2031614707 isParatext "false" @default.
- W2031614707 isRetracted "false" @default.
- W2031614707 magId "2031614707" @default.
- W2031614707 workType "article" @default.