Matches in SemOpenAlex for { <https://semopenalex.org/work/W2031666124> ?p ?o ?g. }
- W2031666124 abstract "Abstract A method of vacuum deposition of 98% aluminium with 2% silicon is described. Photolithographic work for selective etching is also mentioned. Scanning electron micrograph study and a comparative survey of other metals as interconnecting materials in integrated circuit fabrication are described." @default.
- W2031666124 created "2016-06-24" @default.
- W2031666124 creator A5045112336 @default.
- W2031666124 date "1979-01-01" @default.
- W2031666124 modified "2023-09-27" @default.
- W2031666124 title "Aluminium alloy as an interconnecting material in the fabrication of integrated circuits" @default.
- W2031666124 cites W1461658223 @default.
- W2031666124 cites W1966692904 @default.
- W2031666124 cites W1974251472 @default.
- W2031666124 cites W1982688786 @default.
- W2031666124 cites W1983257641 @default.
- W2031666124 cites W1983876646 @default.
- W2031666124 cites W1988234589 @default.
- W2031666124 cites W1994139795 @default.
- W2031666124 cites W2012484355 @default.
- W2031666124 cites W2015101381 @default.
- W2031666124 cites W2027082441 @default.
- W2031666124 cites W2030147937 @default.
- W2031666124 cites W2051725270 @default.
- W2031666124 cites W2077782257 @default.
- W2031666124 cites W2093667675 @default.
- W2031666124 cites W2103757453 @default.
- W2031666124 cites W2112878652 @default.
- W2031666124 cites W2318907164 @default.
- W2031666124 cites W2543572438 @default.
- W2031666124 cites W367378646 @default.
- W2031666124 doi "https://doi.org/10.1016/0026-2714(79)90150-1" @default.
- W2031666124 hasPublicationYear "1979" @default.
- W2031666124 type Work @default.
- W2031666124 sameAs 2031666124 @default.
- W2031666124 citedByCount "3" @default.
- W2031666124 countsByYear W20316661242017 @default.
- W2031666124 crossrefType "journal-article" @default.
- W2031666124 hasAuthorship W2031666124A5045112336 @default.
- W2031666124 hasConcept C100460472 @default.
- W2031666124 hasConcept C127313418 @default.
- W2031666124 hasConcept C127413603 @default.
- W2031666124 hasConcept C136525101 @default.
- W2031666124 hasConcept C142724271 @default.
- W2031666124 hasConcept C151730666 @default.
- W2031666124 hasConcept C159985019 @default.
- W2031666124 hasConcept C171250308 @default.
- W2031666124 hasConcept C191897082 @default.
- W2031666124 hasConcept C192562407 @default.
- W2031666124 hasConcept C204787440 @default.
- W2031666124 hasConcept C24326235 @default.
- W2031666124 hasConcept C26771246 @default.
- W2031666124 hasConcept C2779227376 @default.
- W2031666124 hasConcept C2779821118 @default.
- W2031666124 hasConcept C2816523 @default.
- W2031666124 hasConcept C49040817 @default.
- W2031666124 hasConcept C513153333 @default.
- W2031666124 hasConcept C530198007 @default.
- W2031666124 hasConcept C544956773 @default.
- W2031666124 hasConcept C64297162 @default.
- W2031666124 hasConcept C71924100 @default.
- W2031666124 hasConceptScore W2031666124C100460472 @default.
- W2031666124 hasConceptScore W2031666124C127313418 @default.
- W2031666124 hasConceptScore W2031666124C127413603 @default.
- W2031666124 hasConceptScore W2031666124C136525101 @default.
- W2031666124 hasConceptScore W2031666124C142724271 @default.
- W2031666124 hasConceptScore W2031666124C151730666 @default.
- W2031666124 hasConceptScore W2031666124C159985019 @default.
- W2031666124 hasConceptScore W2031666124C171250308 @default.
- W2031666124 hasConceptScore W2031666124C191897082 @default.
- W2031666124 hasConceptScore W2031666124C192562407 @default.
- W2031666124 hasConceptScore W2031666124C204787440 @default.
- W2031666124 hasConceptScore W2031666124C24326235 @default.
- W2031666124 hasConceptScore W2031666124C26771246 @default.
- W2031666124 hasConceptScore W2031666124C2779227376 @default.
- W2031666124 hasConceptScore W2031666124C2779821118 @default.
- W2031666124 hasConceptScore W2031666124C2816523 @default.
- W2031666124 hasConceptScore W2031666124C49040817 @default.
- W2031666124 hasConceptScore W2031666124C513153333 @default.
- W2031666124 hasConceptScore W2031666124C530198007 @default.
- W2031666124 hasConceptScore W2031666124C544956773 @default.
- W2031666124 hasConceptScore W2031666124C64297162 @default.
- W2031666124 hasConceptScore W2031666124C71924100 @default.
- W2031666124 hasLocation W20316661241 @default.
- W2031666124 hasOpenAccess W2031666124 @default.
- W2031666124 hasPrimaryLocation W20316661241 @default.
- W2031666124 hasRelatedWork W149004572 @default.
- W2031666124 hasRelatedWork W1979424950 @default.
- W2031666124 hasRelatedWork W1991096569 @default.
- W2031666124 hasRelatedWork W1997969581 @default.
- W2031666124 hasRelatedWork W2002036932 @default.
- W2031666124 hasRelatedWork W2002131066 @default.
- W2031666124 hasRelatedWork W2022565159 @default.
- W2031666124 hasRelatedWork W2045460955 @default.
- W2031666124 hasRelatedWork W2067594847 @default.
- W2031666124 hasRelatedWork W2078954809 @default.
- W2031666124 hasRelatedWork W2080701554 @default.
- W2031666124 hasRelatedWork W2095306347 @default.
- W2031666124 hasRelatedWork W2099183759 @default.
- W2031666124 hasRelatedWork W2130172762 @default.
- W2031666124 hasRelatedWork W2136152744 @default.
- W2031666124 hasRelatedWork W2145318291 @default.
- W2031666124 hasRelatedWork W2164062241 @default.
- W2031666124 hasRelatedWork W2283623411 @default.
- W2031666124 hasRelatedWork W2540389274 @default.