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- W2031777901 abstract "In this paper, the mechanical properties of wafer-level high density Cu-Cu bonding are analyzed. The fabrication flow is optimized based on surface cleanliness, wafer uniformity, W2W alignment accuracy and oxide recess for successful bonding. Post- bonding characterizations include shear test and failure analysis to identify the mechanical strength and failure mechanisms. It is found that failures at Cu-Cu bonding interface are largely attributed to wafer non-uniformity." @default.
- W2031777901 created "2016-06-24" @default.
- W2031777901 creator A5006527469 @default.
- W2031777901 creator A5022618493 @default.
- W2031777901 creator A5042727705 @default.
- W2031777901 creator A5050000000 @default.
- W2031777901 creator A5059759377 @default.
- W2031777901 date "2012-12-01" @default.
- W2031777901 modified "2023-09-25" @default.
- W2031777901 title "Mechanical characterization of wafer level bump-less Cu-Cu bonding" @default.
- W2031777901 cites W1971322722 @default.
- W2031777901 cites W2106514741 @default.
- W2031777901 cites W2113026181 @default.
- W2031777901 cites W2119047303 @default.
- W2031777901 cites W2132228965 @default.
- W2031777901 cites W2136056669 @default.
- W2031777901 cites W2143960750 @default.
- W2031777901 cites W2154322864 @default.
- W2031777901 cites W2155816545 @default.
- W2031777901 cites W2162856332 @default.
- W2031777901 cites W2316272245 @default.
- W2031777901 cites W3167198171 @default.
- W2031777901 doi "https://doi.org/10.1109/eptc.2012.6507123" @default.
- W2031777901 hasPublicationYear "2012" @default.
- W2031777901 type Work @default.
- W2031777901 sameAs 2031777901 @default.
- W2031777901 citedByCount "0" @default.
- W2031777901 crossrefType "proceedings-article" @default.
- W2031777901 hasAuthorship W2031777901A5006527469 @default.
- W2031777901 hasAuthorship W2031777901A5022618493 @default.
- W2031777901 hasAuthorship W2031777901A5042727705 @default.
- W2031777901 hasAuthorship W2031777901A5050000000 @default.
- W2031777901 hasAuthorship W2031777901A5059759377 @default.
- W2031777901 hasConcept C127893833 @default.
- W2031777901 hasConcept C136525101 @default.
- W2031777901 hasConcept C142724271 @default.
- W2031777901 hasConcept C159390177 @default.
- W2031777901 hasConcept C159750122 @default.
- W2031777901 hasConcept C159985019 @default.
- W2031777901 hasConcept C160671074 @default.
- W2031777901 hasConcept C171250308 @default.
- W2031777901 hasConcept C192562407 @default.
- W2031777901 hasConcept C201414436 @default.
- W2031777901 hasConcept C204787440 @default.
- W2031777901 hasConcept C2778071519 @default.
- W2031777901 hasConcept C2779133538 @default.
- W2031777901 hasConcept C2780841128 @default.
- W2031777901 hasConcept C2984173401 @default.
- W2031777901 hasConcept C39432304 @default.
- W2031777901 hasConcept C41151612 @default.
- W2031777901 hasConcept C71924100 @default.
- W2031777901 hasConcept C96035792 @default.
- W2031777901 hasConceptScore W2031777901C127893833 @default.
- W2031777901 hasConceptScore W2031777901C136525101 @default.
- W2031777901 hasConceptScore W2031777901C142724271 @default.
- W2031777901 hasConceptScore W2031777901C159390177 @default.
- W2031777901 hasConceptScore W2031777901C159750122 @default.
- W2031777901 hasConceptScore W2031777901C159985019 @default.
- W2031777901 hasConceptScore W2031777901C160671074 @default.
- W2031777901 hasConceptScore W2031777901C171250308 @default.
- W2031777901 hasConceptScore W2031777901C192562407 @default.
- W2031777901 hasConceptScore W2031777901C201414436 @default.
- W2031777901 hasConceptScore W2031777901C204787440 @default.
- W2031777901 hasConceptScore W2031777901C2778071519 @default.
- W2031777901 hasConceptScore W2031777901C2779133538 @default.
- W2031777901 hasConceptScore W2031777901C2780841128 @default.
- W2031777901 hasConceptScore W2031777901C2984173401 @default.
- W2031777901 hasConceptScore W2031777901C39432304 @default.
- W2031777901 hasConceptScore W2031777901C41151612 @default.
- W2031777901 hasConceptScore W2031777901C71924100 @default.
- W2031777901 hasConceptScore W2031777901C96035792 @default.
- W2031777901 hasLocation W20317779011 @default.
- W2031777901 hasOpenAccess W2031777901 @default.
- W2031777901 hasPrimaryLocation W20317779011 @default.
- W2031777901 hasRelatedWork W1659111995 @default.
- W2031777901 hasRelatedWork W1979941843 @default.
- W2031777901 hasRelatedWork W1983270982 @default.
- W2031777901 hasRelatedWork W2034467675 @default.
- W2031777901 hasRelatedWork W2045444495 @default.
- W2031777901 hasRelatedWork W2045497019 @default.
- W2031777901 hasRelatedWork W2074819096 @default.
- W2031777901 hasRelatedWork W2080922366 @default.
- W2031777901 hasRelatedWork W2117019713 @default.
- W2031777901 hasRelatedWork W2143957817 @default.
- W2031777901 hasRelatedWork W2147901228 @default.
- W2031777901 hasRelatedWork W2274370588 @default.
- W2031777901 hasRelatedWork W2546735972 @default.
- W2031777901 hasRelatedWork W2793147293 @default.
- W2031777901 hasRelatedWork W2808667038 @default.
- W2031777901 hasRelatedWork W3047704207 @default.
- W2031777901 hasRelatedWork W3085515726 @default.
- W2031777901 hasRelatedWork W3095571208 @default.
- W2031777901 hasRelatedWork W3109767105 @default.
- W2031777901 hasRelatedWork W3147669556 @default.
- W2031777901 isParatext "false" @default.
- W2031777901 isRetracted "false" @default.
- W2031777901 magId "2031777901" @default.
- W2031777901 workType "article" @default.