Matches in SemOpenAlex for { <https://semopenalex.org/work/W2031874465> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2031874465 endingPage "012016" @default.
- W2031874465 startingPage "012016" @default.
- W2031874465 abstract "In this work secondary ion mass spectrometry (SIMS), variable angle spectroscopy ellipsometry (VASE) and atomic force microscopy (AFM) are used to investigate the structure, composition and morphology of multilayer SRON films. Three/four SRON sequential layers were deposited on silicon wafers by PECVD and silicon, nitrogen and oxygen content was varied by changing the N2O/SiH4 ratio. The total thickness of the resulting SRON stack is about 50nm. SIMS analyses of NCs+, OCs+, SiCs+, in MCs+ methodology are performed by a Cameca SC-ultra instrument. Depth profiles are obtained at 500eV of primary beam impact energy with sample rotation. An approximate method to obtain silicon concentration is used. Total layer thickness are obtained from both SIMS and VASE measurements. In addition, we compare the thickness of the single layers obtained from VASE with the SIMS depth profiles. A detailed analysis of films morphology is obtained by AFM. The SRON stack is sputtered by SIMS until a certain layer is exposed, which is then analyzed by AFM. The sputtered layers are then etched in HF solution to better resolve the exposed nano-crystals." @default.
- W2031874465 created "2016-06-24" @default.
- W2031874465 creator A5003182104 @default.
- W2031874465 creator A5006534202 @default.
- W2031874465 creator A5026172779 @default.
- W2031874465 creator A5028147318 @default.
- W2031874465 creator A5032866839 @default.
- W2031874465 creator A5062189858 @default.
- W2031874465 creator A5062235630 @default.
- W2031874465 creator A5071764353 @default.
- W2031874465 creator A5079814380 @default.
- W2031874465 date "2008-03-01" @default.
- W2031874465 modified "2023-09-25" @default.
- W2031874465 title "Multilayer silicon rich oxy-nitride films characterization by SIMS, VASE and AFM" @default.
- W2031874465 cites W2038482556 @default.
- W2031874465 cites W2053484767 @default.
- W2031874465 cites W2058422705 @default.
- W2031874465 cites W2108554275 @default.
- W2031874465 doi "https://doi.org/10.1088/1742-6596/100/1/012016" @default.
- W2031874465 hasPublicationYear "2008" @default.
- W2031874465 type Work @default.
- W2031874465 sameAs 2031874465 @default.
- W2031874465 citedByCount "2" @default.
- W2031874465 countsByYear W20318744652012 @default.
- W2031874465 countsByYear W20318744652013 @default.
- W2031874465 crossrefType "journal-article" @default.
- W2031874465 hasAuthorship W2031874465A5003182104 @default.
- W2031874465 hasAuthorship W2031874465A5006534202 @default.
- W2031874465 hasAuthorship W2031874465A5026172779 @default.
- W2031874465 hasAuthorship W2031874465A5028147318 @default.
- W2031874465 hasAuthorship W2031874465A5032866839 @default.
- W2031874465 hasAuthorship W2031874465A5062189858 @default.
- W2031874465 hasAuthorship W2031874465A5062235630 @default.
- W2031874465 hasAuthorship W2031874465A5071764353 @default.
- W2031874465 hasAuthorship W2031874465A5079814380 @default.
- W2031874465 hasConcept C102951782 @default.
- W2031874465 hasConcept C127413603 @default.
- W2031874465 hasConcept C171250308 @default.
- W2031874465 hasConcept C192562407 @default.
- W2031874465 hasConcept C194760766 @default.
- W2031874465 hasConcept C2777431650 @default.
- W2031874465 hasConcept C2779227376 @default.
- W2031874465 hasConcept C2780841128 @default.
- W2031874465 hasConcept C42360764 @default.
- W2031874465 hasConcept C49040817 @default.
- W2031874465 hasConcept C544956773 @default.
- W2031874465 hasConceptScore W2031874465C102951782 @default.
- W2031874465 hasConceptScore W2031874465C127413603 @default.
- W2031874465 hasConceptScore W2031874465C171250308 @default.
- W2031874465 hasConceptScore W2031874465C192562407 @default.
- W2031874465 hasConceptScore W2031874465C194760766 @default.
- W2031874465 hasConceptScore W2031874465C2777431650 @default.
- W2031874465 hasConceptScore W2031874465C2779227376 @default.
- W2031874465 hasConceptScore W2031874465C2780841128 @default.
- W2031874465 hasConceptScore W2031874465C42360764 @default.
- W2031874465 hasConceptScore W2031874465C49040817 @default.
- W2031874465 hasConceptScore W2031874465C544956773 @default.
- W2031874465 hasIssue "1" @default.
- W2031874465 hasLocation W20318744651 @default.
- W2031874465 hasOpenAccess W2031874465 @default.
- W2031874465 hasPrimaryLocation W20318744651 @default.
- W2031874465 hasRelatedWork W1981583104 @default.
- W2031874465 hasRelatedWork W1985987830 @default.
- W2031874465 hasRelatedWork W2001481515 @default.
- W2031874465 hasRelatedWork W2002070225 @default.
- W2031874465 hasRelatedWork W2030242332 @default.
- W2031874465 hasRelatedWork W2591945551 @default.
- W2031874465 hasRelatedWork W4206535999 @default.
- W2031874465 hasRelatedWork W4225347794 @default.
- W2031874465 hasRelatedWork W4306385887 @default.
- W2031874465 hasRelatedWork W4312054318 @default.
- W2031874465 hasVolume "100" @default.
- W2031874465 isParatext "false" @default.
- W2031874465 isRetracted "false" @default.
- W2031874465 magId "2031874465" @default.
- W2031874465 workType "article" @default.