Matches in SemOpenAlex for { <https://semopenalex.org/work/W2032023236> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W2032023236 abstract "In this work, we report the demonstration of a novel CMOS process with substrate-strained-SiGe pMOSFET and mechanical-strained Si nMOSFET fabricated on one chip. The device structure combines the advantages of compressively SiGe materials and tensile Si induced by SiN layer to achieve higher carrier mobility. Moreover, due to the separation process of two kind devices, individual MOSFETs was tuned independently to their optimum performance on the same wafer and show a great flexibility for developing next-generation high-performance CMOS" @default.
- W2032023236 created "2016-06-24" @default.
- W2032023236 creator A5018083836 @default.
- W2032023236 creator A5039419603 @default.
- W2032023236 creator A5040326429 @default.
- W2032023236 creator A5050869909 @default.
- W2032023236 creator A5089783390 @default.
- W2032023236 date "2006-01-01" @default.
- W2032023236 modified "2023-09-27" @default.
- W2032023236 title "Imapct of SiN on Performance in Novel CMOS Architecture Using Substrate Strained-SiGe and Mechanical Strained-Si Technology" @default.
- W2032023236 cites W1968005730 @default.
- W2032023236 cites W2094326408 @default.
- W2032023236 cites W2105992148 @default.
- W2032023236 doi "https://doi.org/10.1109/istdm.2006.246594" @default.
- W2032023236 hasPublicationYear "2006" @default.
- W2032023236 type Work @default.
- W2032023236 sameAs 2032023236 @default.
- W2032023236 citedByCount "0" @default.
- W2032023236 crossrefType "proceedings-article" @default.
- W2032023236 hasAuthorship W2032023236A5018083836 @default.
- W2032023236 hasAuthorship W2032023236A5039419603 @default.
- W2032023236 hasAuthorship W2032023236A5040326429 @default.
- W2032023236 hasAuthorship W2032023236A5050869909 @default.
- W2032023236 hasAuthorship W2032023236A5089783390 @default.
- W2032023236 hasConcept C111368507 @default.
- W2032023236 hasConcept C119599485 @default.
- W2032023236 hasConcept C127313418 @default.
- W2032023236 hasConcept C127413603 @default.
- W2032023236 hasConcept C160671074 @default.
- W2032023236 hasConcept C165801399 @default.
- W2032023236 hasConcept C171250308 @default.
- W2032023236 hasConcept C172385210 @default.
- W2032023236 hasConcept C192245399 @default.
- W2032023236 hasConcept C192562407 @default.
- W2032023236 hasConcept C24326235 @default.
- W2032023236 hasConcept C2776390347 @default.
- W2032023236 hasConcept C2777289219 @default.
- W2032023236 hasConcept C2778413303 @default.
- W2032023236 hasConcept C2779227376 @default.
- W2032023236 hasConcept C2779667780 @default.
- W2032023236 hasConcept C2780389399 @default.
- W2032023236 hasConcept C46362747 @default.
- W2032023236 hasConcept C49040817 @default.
- W2032023236 hasConcept C544956773 @default.
- W2032023236 hasConceptScore W2032023236C111368507 @default.
- W2032023236 hasConceptScore W2032023236C119599485 @default.
- W2032023236 hasConceptScore W2032023236C127313418 @default.
- W2032023236 hasConceptScore W2032023236C127413603 @default.
- W2032023236 hasConceptScore W2032023236C160671074 @default.
- W2032023236 hasConceptScore W2032023236C165801399 @default.
- W2032023236 hasConceptScore W2032023236C171250308 @default.
- W2032023236 hasConceptScore W2032023236C172385210 @default.
- W2032023236 hasConceptScore W2032023236C192245399 @default.
- W2032023236 hasConceptScore W2032023236C192562407 @default.
- W2032023236 hasConceptScore W2032023236C24326235 @default.
- W2032023236 hasConceptScore W2032023236C2776390347 @default.
- W2032023236 hasConceptScore W2032023236C2777289219 @default.
- W2032023236 hasConceptScore W2032023236C2778413303 @default.
- W2032023236 hasConceptScore W2032023236C2779227376 @default.
- W2032023236 hasConceptScore W2032023236C2779667780 @default.
- W2032023236 hasConceptScore W2032023236C2780389399 @default.
- W2032023236 hasConceptScore W2032023236C46362747 @default.
- W2032023236 hasConceptScore W2032023236C49040817 @default.
- W2032023236 hasConceptScore W2032023236C544956773 @default.
- W2032023236 hasLocation W20320232361 @default.
- W2032023236 hasOpenAccess W2032023236 @default.
- W2032023236 hasPrimaryLocation W20320232361 @default.
- W2032023236 hasRelatedWork W1756585478 @default.
- W2032023236 hasRelatedWork W1873534882 @default.
- W2032023236 hasRelatedWork W1981513728 @default.
- W2032023236 hasRelatedWork W2021791336 @default.
- W2032023236 hasRelatedWork W2041712241 @default.
- W2032023236 hasRelatedWork W2280517318 @default.
- W2032023236 hasRelatedWork W2319970007 @default.
- W2032023236 hasRelatedWork W2379481380 @default.
- W2032023236 hasRelatedWork W2770490537 @default.
- W2032023236 hasRelatedWork W2764560018 @default.
- W2032023236 isParatext "false" @default.
- W2032023236 isRetracted "false" @default.
- W2032023236 magId "2032023236" @default.
- W2032023236 workType "article" @default.