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- W2032037750 abstract "We report on the fabrication of 50nm metamorphicGaAsHEMTs with a very high yield and uniformity asdetermined by DC characterisation, and excellent RF figures ofmerit. The T-gates were realised using a combination of highresolution electron beam lithography using a bi-layer (ratherthan the usual tri-layer) of PMMA/Co-polymer and a selectivewet etch to form the gate recess. With an electrical yield greater than 95 %, the devices displayed a threshold voltage of -0.445V with a standard deviation of ± 0.005V. The transconductance of the devices was 1169mS/mm 83 mS/mm and demonstrated a cut-off frequency, fT of 330GHz." @default.
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- W2032037750 date "2004-01-01" @default.
- W2032037750 modified "2023-09-25" @default.
- W2032037750 title "Fabrication of very high performance 50nm T-gate metamorphic GaAs HEMT's with exceptional uniformity" @default.
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