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- W2032045557 abstract "Abstract We investigated the distribution of tunneling current through ultrathin oxide films on Si(111) with an atomic force microscope having a conductive tip. We observed enhancement of the tunneling current at step edges for the oxide grown in dry O2 at 600°C, while the oxide grown in NHO3 showed only small contrast over the surface. With analysis of the current–voltage characteristics, the tunneling current enhancement could reflect the interface states at the step edges." @default.
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- W2032045557 date "1999-12-01" @default.
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- W2032045557 title "Interface states of SiO2/Si(111) observed by an atomic force microscope" @default.
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- W2032045557 doi "https://doi.org/10.1016/s0039-6028(99)01023-7" @default.
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