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- W2032062662 abstract "The composition of positive ions was investigated using a time-of-flight mass spectrometer in high-density CF 4 and C 4 F 8 helicon plasmas. For low ( n e <1 ×10 12 cm -3 ) electron densities, the dominant positive ions were CF 3 + and CF + in the CF 4 and C 4 F 8 plasmas, respectively, while for high ( n e >8 ×10 12 cm -3 ) electron densities, the dominant positive ions were C + and F + in both the CF 4 and C 4 F 8 plasmas. However, the C + /F + ion current ratio was higher in the C 4 F 8 plasma than the CF 4 plasma. The reaction kinetics of positive ions is discussed based on the electron density dependence of the mass spectral intensities." @default.
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- W2032062662 title "Time-of-Flight Mass Spectrometry of Positive Ions in Helicon-Wave Excited High-Density CF<sub> 4</sub> and C<sub> 4</sub>F<sub> 8</sub> Plasmas" @default.
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- W2032062662 doi "https://doi.org/10.1143/jjap.36.1282" @default.
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