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- W2032071120 abstract "Shallow dopant passivation in AlInAs and InGaP exposed to low power (0.08 W cm−2) deuterium plasmas was investigated by Hall effect and secondary ion mass spectrometry measurements. The carrier concentration in AlInAs was reduced by factors of 3–4 in both Si- and Zn-doped epitaxial layers upon exposure to a D2 plasma at 200 °C. Substantially greater reductions are observed in Si-doped InGaP (500×reduction) and Be-doped InGaP (15×reduction) under the same conditions. Complete reactivation of all the passivated dopants occurs in the temperature range 350–425 °C for annealing in inert ambients. By contrast, the use of hydrogen containing ambients during post-plasma annealing enhances the apparent stability of the dopant passivation. The diffusivity of deuterium is greater in p-type layers than in n-type layers for each material." @default.
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- W2032071120 date "1991-11-18" @default.
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- W2032071120 title "Dopant passivation in AlInAs and InGaP by atomic deuterium" @default.
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- W2032071120 doi "https://doi.org/10.1063/1.105890" @default.
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