Matches in SemOpenAlex for { <https://semopenalex.org/work/W2032094311> ?p ?o ?g. }
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98
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- W2032094311 endingPage "39" @default.
- W2032094311 startingPage "34" @default.
- W2032094311 abstract "Abstract Cu thin films as a seed layer were deposited on Si (1 0 0) substrates by applying a negative substrate bias voltage using a non-mass separated ion beam deposition method. Using resistivity measurement, X-ray diffraction analysis, atomic force microscopy, secondary ion mass spectroscopy, and scanning electron microscopy, the Cu films were characterized. The Cu films deposited at the substrate bias voltage of −50 V showed higher purity, strong (1 1 1) preferred orientation, smoother surface and better step coverage in comparison with the Cu films deposited without the substrate bias voltage. The thickness dependence of the resistivity showed clear size effects with decreasing the film thickness. In the case of Cu (100 nm)/Ta (50 nm)/Si structures, the Cu films deposited on Ta/Si substrates by applied the substrate bias voltage maintained a completely (1 1 1) preferred orientation without (2 0 0) texture even after thermal annealing at 450 °C for 60 min." @default.
- W2032094311 created "2016-06-24" @default.
- W2032094311 creator A5043368756 @default.
- W2032094311 creator A5053449827 @default.
- W2032094311 creator A5083648197 @default.
- W2032094311 date "2003-06-01" @default.
- W2032094311 modified "2023-09-24" @default.
- W2032094311 title "Characteristics of ion beam deposited copper thin films as a seed layer: effect of negative substrate bias voltage" @default.
- W2032094311 cites W1965162838 @default.
- W2032094311 cites W1973947465 @default.
- W2032094311 cites W1976125417 @default.
- W2032094311 cites W1990989521 @default.
- W2032094311 cites W1998498299 @default.
- W2032094311 cites W2001618648 @default.
- W2032094311 cites W2004598442 @default.
- W2032094311 cites W2007551590 @default.
- W2032094311 cites W2034953934 @default.
- W2032094311 cites W2048084832 @default.
- W2032094311 cites W2051492915 @default.
- W2032094311 cites W2055606813 @default.
- W2032094311 cites W2068882273 @default.
- W2032094311 cites W2076260319 @default.
- W2032094311 cites W2077461818 @default.
- W2032094311 cites W2102984992 @default.
- W2032094311 cites W2155139368 @default.
- W2032094311 cites W2155715085 @default.
- W2032094311 doi "https://doi.org/10.1016/s0040-6090(03)00540-6" @default.
- W2032094311 hasPublicationYear "2003" @default.
- W2032094311 type Work @default.
- W2032094311 sameAs 2032094311 @default.
- W2032094311 citedByCount "10" @default.
- W2032094311 countsByYear W20320943112015 @default.
- W2032094311 countsByYear W20320943112016 @default.
- W2032094311 countsByYear W20320943112018 @default.
- W2032094311 countsByYear W20320943112023 @default.
- W2032094311 crossrefType "journal-article" @default.
- W2032094311 hasAuthorship W2032094311A5043368756 @default.
- W2032094311 hasAuthorship W2032094311A5053449827 @default.
- W2032094311 hasAuthorship W2032094311A5083648197 @default.
- W2032094311 hasConcept C111368507 @default.
- W2032094311 hasConcept C119599485 @default.
- W2032094311 hasConcept C127313418 @default.
- W2032094311 hasConcept C127413603 @default.
- W2032094311 hasConcept C145148216 @default.
- W2032094311 hasConcept C165801399 @default.
- W2032094311 hasConcept C171250308 @default.
- W2032094311 hasConcept C178790620 @default.
- W2032094311 hasConcept C185592680 @default.
- W2032094311 hasConcept C19067145 @default.
- W2032094311 hasConcept C191897082 @default.
- W2032094311 hasConcept C192562407 @default.
- W2032094311 hasConcept C20254490 @default.
- W2032094311 hasConcept C2777289219 @default.
- W2032094311 hasConcept C2779227376 @default.
- W2032094311 hasConcept C3019891514 @default.
- W2032094311 hasConcept C49040817 @default.
- W2032094311 hasConcept C50774322 @default.
- W2032094311 hasConcept C544778455 @default.
- W2032094311 hasConceptScore W2032094311C111368507 @default.
- W2032094311 hasConceptScore W2032094311C119599485 @default.
- W2032094311 hasConceptScore W2032094311C127313418 @default.
- W2032094311 hasConceptScore W2032094311C127413603 @default.
- W2032094311 hasConceptScore W2032094311C145148216 @default.
- W2032094311 hasConceptScore W2032094311C165801399 @default.
- W2032094311 hasConceptScore W2032094311C171250308 @default.
- W2032094311 hasConceptScore W2032094311C178790620 @default.
- W2032094311 hasConceptScore W2032094311C185592680 @default.
- W2032094311 hasConceptScore W2032094311C19067145 @default.
- W2032094311 hasConceptScore W2032094311C191897082 @default.
- W2032094311 hasConceptScore W2032094311C192562407 @default.
- W2032094311 hasConceptScore W2032094311C20254490 @default.
- W2032094311 hasConceptScore W2032094311C2777289219 @default.
- W2032094311 hasConceptScore W2032094311C2779227376 @default.
- W2032094311 hasConceptScore W2032094311C3019891514 @default.
- W2032094311 hasConceptScore W2032094311C49040817 @default.
- W2032094311 hasConceptScore W2032094311C50774322 @default.
- W2032094311 hasConceptScore W2032094311C544778455 @default.
- W2032094311 hasIssue "1-2" @default.
- W2032094311 hasLocation W20320943111 @default.
- W2032094311 hasOpenAccess W2032094311 @default.
- W2032094311 hasPrimaryLocation W20320943111 @default.
- W2032094311 hasRelatedWork W1994408439 @default.
- W2032094311 hasRelatedWork W2139871202 @default.
- W2032094311 hasRelatedWork W2148454783 @default.
- W2032094311 hasRelatedWork W2221505915 @default.
- W2032094311 hasRelatedWork W2276988595 @default.
- W2032094311 hasRelatedWork W2386882164 @default.
- W2032094311 hasRelatedWork W2424493026 @default.
- W2032094311 hasRelatedWork W2913336380 @default.
- W2032094311 hasRelatedWork W3111874403 @default.
- W2032094311 hasRelatedWork W3115037099 @default.
- W2032094311 hasVolume "434" @default.
- W2032094311 isParatext "false" @default.
- W2032094311 isRetracted "false" @default.
- W2032094311 magId "2032094311" @default.
- W2032094311 workType "article" @default.