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• W2032104965 startingPage "1813" @default.
• W2032104965 abstract "The authors proposed a method to fabricate field emitter arrays with uniform apex diameters in tens of nanometer scale based on the molding technique and apply it to fabricate molybdenum field emitter arrays. Apex diameter equal to 23±5nm was observed in a 6×6 tip array by high-resolution scanning electron microscope. They also studied the field-emission characteristics in devices with gate electrodes fabricated on top of the arrays by a self-aligned process. In single-gate devices, emission current of up to 20μA per tip with negligible gate leak current was observed. The gate-fabrication process was extended to fabricate double-gated emitters. Further optimization of the fabrication process for higher emission current, together with metallurgical and lithographic methods, is discussed." @default.
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• W2032104965 date "2009-06-23" @default.
• W2032104965 modified "2023-09-23" @default.
• W2032104965 title "Fabrication of all-metal field emitter arrays with controlled apex sizes by molding" @default.
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• W2032104965 doi "https://doi.org/10.1116/1.3151852" @default.
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