Matches in SemOpenAlex for { <https://semopenalex.org/work/W2032136529> ?p ?o ?g. }
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- W2032136529 endingPage "3817" @default.
- W2032136529 startingPage "3815" @default.
- W2032136529 abstract "We propose a method to improve the impact energy of ions implanted into the interior sidewalls of cylindrical specimens during plasma immersion ion implantation. Our idea is based on a zero potential conductive auxiliary electrode positioned at the axis of the implanted cylindrical bore. We calculate the structure of the ion-matrix sheath in an infinitely long cylindrical bore with an auxiliary electrode and analyze the dependence of the radius of the auxiliary electrode on the electric field in the bore. Our results show that the auxiliary electrode improves significantly the distributions of the potential and the electric field inside the cylindrical bore. In addition, because the auxiliary electrode improves the potential drop from axis to sidewalls of the bore and introduces an electric field component which does not vary when the ions are implanted into the sidewalls, the impact energy can be improved in a cylindrical bore during plasma immersion ion implantation." @default.
- W2032136529 created "2016-06-24" @default.
- W2032136529 creator A5012041033 @default.
- W2032136529 creator A5022716538 @default.
- W2032136529 creator A5043065335 @default.
- W2032136529 date "1996-12-16" @default.
- W2032136529 modified "2023-09-23" @default.
- W2032136529 title "Improving the plasma immersion ion implantation impact energy inside a cylindrical bore by using an auxiliary electrode" @default.
- W2032136529 doi "https://doi.org/10.1063/1.117114" @default.
- W2032136529 hasPublicationYear "1996" @default.
- W2032136529 type Work @default.
- W2032136529 sameAs 2032136529 @default.
- W2032136529 citedByCount "39" @default.
- W2032136529 countsByYear W20321365292012 @default.
- W2032136529 countsByYear W20321365292013 @default.
- W2032136529 countsByYear W20321365292014 @default.
- W2032136529 countsByYear W20321365292015 @default.
- W2032136529 countsByYear W20321365292016 @default.
- W2032136529 countsByYear W20321365292017 @default.
- W2032136529 countsByYear W20321365292018 @default.
- W2032136529 crossrefType "journal-article" @default.
- W2032136529 hasAuthorship W2032136529A5012041033 @default.
- W2032136529 hasAuthorship W2032136529A5022716538 @default.
- W2032136529 hasAuthorship W2032136529A5043065335 @default.
- W2032136529 hasConcept C119599485 @default.
- W2032136529 hasConcept C121332964 @default.
- W2032136529 hasConcept C127413603 @default.
- W2032136529 hasConcept C145148216 @default.
- W2032136529 hasConcept C147789679 @default.
- W2032136529 hasConcept C159985019 @default.
- W2032136529 hasConcept C165801399 @default.
- W2032136529 hasConcept C17525397 @default.
- W2032136529 hasConcept C178635117 @default.
- W2032136529 hasConcept C178790620 @default.
- W2032136529 hasConcept C184779094 @default.
- W2032136529 hasConcept C185592680 @default.
- W2032136529 hasConcept C192562407 @default.
- W2032136529 hasConcept C199068039 @default.
- W2032136529 hasConcept C2524010 @default.
- W2032136529 hasConcept C2778702798 @default.
- W2032136529 hasConcept C2781345722 @default.
- W2032136529 hasConcept C33923547 @default.
- W2032136529 hasConcept C38652104 @default.
- W2032136529 hasConcept C41008148 @default.
- W2032136529 hasConcept C41823505 @default.
- W2032136529 hasConcept C58570533 @default.
- W2032136529 hasConcept C60799052 @default.
- W2032136529 hasConcept C62520636 @default.
- W2032136529 hasConcept C82706917 @default.
- W2032136529 hasConceptScore W2032136529C119599485 @default.
- W2032136529 hasConceptScore W2032136529C121332964 @default.
- W2032136529 hasConceptScore W2032136529C127413603 @default.
- W2032136529 hasConceptScore W2032136529C145148216 @default.
- W2032136529 hasConceptScore W2032136529C147789679 @default.
- W2032136529 hasConceptScore W2032136529C159985019 @default.
- W2032136529 hasConceptScore W2032136529C165801399 @default.
- W2032136529 hasConceptScore W2032136529C17525397 @default.
- W2032136529 hasConceptScore W2032136529C178635117 @default.
- W2032136529 hasConceptScore W2032136529C178790620 @default.
- W2032136529 hasConceptScore W2032136529C184779094 @default.
- W2032136529 hasConceptScore W2032136529C185592680 @default.
- W2032136529 hasConceptScore W2032136529C192562407 @default.
- W2032136529 hasConceptScore W2032136529C199068039 @default.
- W2032136529 hasConceptScore W2032136529C2524010 @default.
- W2032136529 hasConceptScore W2032136529C2778702798 @default.
- W2032136529 hasConceptScore W2032136529C2781345722 @default.
- W2032136529 hasConceptScore W2032136529C33923547 @default.
- W2032136529 hasConceptScore W2032136529C38652104 @default.
- W2032136529 hasConceptScore W2032136529C41008148 @default.
- W2032136529 hasConceptScore W2032136529C41823505 @default.
- W2032136529 hasConceptScore W2032136529C58570533 @default.
- W2032136529 hasConceptScore W2032136529C60799052 @default.
- W2032136529 hasConceptScore W2032136529C62520636 @default.
- W2032136529 hasConceptScore W2032136529C82706917 @default.
- W2032136529 hasIssue "25" @default.
- W2032136529 hasLocation W20321365291 @default.
- W2032136529 hasOpenAccess W2032136529 @default.
- W2032136529 hasPrimaryLocation W20321365291 @default.
- W2032136529 hasRelatedWork W1723143330 @default.
- W2032136529 hasRelatedWork W1977088335 @default.
- W2032136529 hasRelatedWork W1986237822 @default.
- W2032136529 hasRelatedWork W2011816076 @default.
- W2032136529 hasRelatedWork W2026453848 @default.
- W2032136529 hasRelatedWork W2037903964 @default.
- W2032136529 hasRelatedWork W2061407937 @default.
- W2032136529 hasRelatedWork W2089595141 @default.
- W2032136529 hasRelatedWork W2089980658 @default.
- W2032136529 hasRelatedWork W2365882335 @default.
- W2032136529 hasVolume "69" @default.
- W2032136529 isParatext "false" @default.
- W2032136529 isRetracted "false" @default.
- W2032136529 magId "2032136529" @default.
- W2032136529 workType "article" @default.