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- W2032154782 abstract "Ni100 - xFex films were deposited on MgO(001) substrates at 250°C by dc plasma sputtering of the Ni30Fe70(Invar) target at 2.5kV in pure Ar gas. A dc bias voltage Vs from 0 to -180V was applied to the substrate during deposition. The film thickness was controlled by changing the sputtering time t from 30sec to 5min. The initial growth structure and composition of the films were investigated by XPS and plan-view-TEM. The resistance R and its temperature coefficient TCR (150K to 300K) were as a function of t and of Vs. The Ni100-xFex films where x ranges from 69±3 to 71±3 weakly dependent on Vs can be prepared. The films are initially grown in a BCC structure with NiFe(001) ∥MgO (001) and NiFe[110] ∥ MgO[100] when t is 30sec. As t reaches 1min, the FCC phase appears in the films. When t increases beyond 2 min, the films retain mainly the FCC-NiFe structure with NiFe(001) ∥ MgO(001) and NiFe[100] ∥ MgO[100]. The films are not electrically continuons unless t reaches 2 min, 1 and 30 sec at Vs=OV, -120 V and -180 V, respectively. R decreases with an increase in t and in V s , while TCR changes consistently with the change of R." @default.
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- W2032154782 date "1998-08-01" @default.
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- W2032154782 title "Phase Change during the Initial of Ni<sub>30</sub>Fe<sub>70</sub>(Invar) Films on MgO(001) by DC-Biased Plasma-Sputter-Deposition" @default.
- W2032154782 doi "https://doi.org/10.4028/www.scientific.net/msf.287-288.347" @default.
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