Matches in SemOpenAlex for { <https://semopenalex.org/work/W2032193265> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2032193265 abstract "This work presents a novel fabrication method for homogeneous and sharp nanoprobe array on (111) silicon wafer. Utilizing the specific spatial structure of {111} planes and self-limiting procedure, the probe can be made with precisely controlled size requiring only a series of conventional semiconductor processes (dry etching of silicon by DRIE, anisotropic wet etching by potassium hydroxide solution and thermal-oxidation-based tip sharpening). The fabricated probe is composed of a pyramid-shaped base and a sharp tip. The diameter of the tip is less than 30 nm, with a vertex angle less than 18°." @default.
- W2032193265 created "2016-06-24" @default.
- W2032193265 creator A5002318539 @default.
- W2032193265 creator A5028699131 @default.
- W2032193265 creator A5052817162 @default.
- W2032193265 creator A5067104355 @default.
- W2032193265 creator A5076075304 @default.
- W2032193265 date "2013-11-01" @default.
- W2032193265 modified "2023-09-23" @default.
- W2032193265 title "Homogeneous and sharp Si nanoprobe array fabricated on (111) silicon wafer" @default.
- W2032193265 cites W1966700482 @default.
- W2032193265 cites W1984412182 @default.
- W2032193265 cites W2016901201 @default.
- W2032193265 cites W2021064127 @default.
- W2032193265 cites W2046451465 @default.
- W2032193265 cites W2053665703 @default.
- W2032193265 cites W2066162034 @default.
- W2032193265 cites W2070530838 @default.
- W2032193265 cites W2095324679 @default.
- W2032193265 cites W2108879111 @default.
- W2032193265 cites W2121545661 @default.
- W2032193265 cites W2162930691 @default.
- W2032193265 cites W2579882869 @default.
- W2032193265 doi "https://doi.org/10.1109/icsens.2013.6688303" @default.
- W2032193265 hasPublicationYear "2013" @default.
- W2032193265 type Work @default.
- W2032193265 sameAs 2032193265 @default.
- W2032193265 citedByCount "0" @default.
- W2032193265 crossrefType "proceedings-article" @default.
- W2032193265 hasAuthorship W2032193265A5002318539 @default.
- W2032193265 hasAuthorship W2032193265A5028699131 @default.
- W2032193265 hasAuthorship W2032193265A5052817162 @default.
- W2032193265 hasAuthorship W2032193265A5067104355 @default.
- W2032193265 hasAuthorship W2032193265A5076075304 @default.
- W2032193265 hasConcept C100460472 @default.
- W2032193265 hasConcept C124634506 @default.
- W2032193265 hasConcept C127413603 @default.
- W2032193265 hasConcept C1291036 @default.
- W2032193265 hasConcept C130472188 @default.
- W2032193265 hasConcept C136525101 @default.
- W2032193265 hasConcept C142724271 @default.
- W2032193265 hasConcept C155672457 @default.
- W2032193265 hasConcept C160671074 @default.
- W2032193265 hasConcept C16387964 @default.
- W2032193265 hasConcept C171250308 @default.
- W2032193265 hasConcept C192562407 @default.
- W2032193265 hasConcept C204787440 @default.
- W2032193265 hasConcept C2779227376 @default.
- W2032193265 hasConcept C2779439175 @default.
- W2032193265 hasConcept C2781137444 @default.
- W2032193265 hasConcept C31972630 @default.
- W2032193265 hasConcept C33220542 @default.
- W2032193265 hasConcept C41008148 @default.
- W2032193265 hasConcept C42360764 @default.
- W2032193265 hasConcept C49040817 @default.
- W2032193265 hasConcept C544956773 @default.
- W2032193265 hasConcept C71924100 @default.
- W2032193265 hasConceptScore W2032193265C100460472 @default.
- W2032193265 hasConceptScore W2032193265C124634506 @default.
- W2032193265 hasConceptScore W2032193265C127413603 @default.
- W2032193265 hasConceptScore W2032193265C1291036 @default.
- W2032193265 hasConceptScore W2032193265C130472188 @default.
- W2032193265 hasConceptScore W2032193265C136525101 @default.
- W2032193265 hasConceptScore W2032193265C142724271 @default.
- W2032193265 hasConceptScore W2032193265C155672457 @default.
- W2032193265 hasConceptScore W2032193265C160671074 @default.
- W2032193265 hasConceptScore W2032193265C16387964 @default.
- W2032193265 hasConceptScore W2032193265C171250308 @default.
- W2032193265 hasConceptScore W2032193265C192562407 @default.
- W2032193265 hasConceptScore W2032193265C204787440 @default.
- W2032193265 hasConceptScore W2032193265C2779227376 @default.
- W2032193265 hasConceptScore W2032193265C2779439175 @default.
- W2032193265 hasConceptScore W2032193265C2781137444 @default.
- W2032193265 hasConceptScore W2032193265C31972630 @default.
- W2032193265 hasConceptScore W2032193265C33220542 @default.
- W2032193265 hasConceptScore W2032193265C41008148 @default.
- W2032193265 hasConceptScore W2032193265C42360764 @default.
- W2032193265 hasConceptScore W2032193265C49040817 @default.
- W2032193265 hasConceptScore W2032193265C544956773 @default.
- W2032193265 hasConceptScore W2032193265C71924100 @default.
- W2032193265 hasLocation W20321932651 @default.
- W2032193265 hasOpenAccess W2032193265 @default.
- W2032193265 hasPrimaryLocation W20321932651 @default.
- W2032193265 hasRelatedWork W2027012391 @default.
- W2032193265 hasRelatedWork W2029319775 @default.
- W2032193265 hasRelatedWork W2032193265 @default.
- W2032193265 hasRelatedWork W2055095209 @default.
- W2032193265 hasRelatedWork W2091036922 @default.
- W2032193265 hasRelatedWork W2160557247 @default.
- W2032193265 hasRelatedWork W2903101056 @default.
- W2032193265 hasRelatedWork W3154415556 @default.
- W2032193265 hasRelatedWork W4249821185 @default.
- W2032193265 hasRelatedWork W4310139598 @default.
- W2032193265 isParatext "false" @default.
- W2032193265 isRetracted "false" @default.
- W2032193265 magId "2032193265" @default.
- W2032193265 workType "article" @default.