Matches in SemOpenAlex for { <https://semopenalex.org/work/W2032255057> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2032255057 endingPage "1033" @default.
- W2032255057 startingPage "1029" @default.
- W2032255057 abstract "Details are presented of the design of a small DC planar magnetron source and its use in a research-scale UHV getter sputter deposition system. The system has been used for depositing a range of refractory materials as well as some metal multilayer structures (single crystal, polycrystalline and amorphous). For some of these structures a relatively high sputtering pressure is required and a study has been made of the deposition rate as a function of pressure for a range of different elements. This illustrates the effect of the momentum and energy transfer of the sputtered atoms as they travel from the target to the substrate." @default.
- W2032255057 created "2016-06-24" @default.
- W2032255057 creator A5049526544 @default.
- W2032255057 creator A5054968582 @default.
- W2032255057 date "1988-11-01" @default.
- W2032255057 modified "2023-09-26" @default.
- W2032255057 title "UHV sputter deposition with a research-scale DC magnetron" @default.
- W2032255057 cites W1963728900 @default.
- W2032255057 cites W1972300312 @default.
- W2032255057 cites W1972326420 @default.
- W2032255057 cites W1973207124 @default.
- W2032255057 cites W1979605872 @default.
- W2032255057 cites W1998775967 @default.
- W2032255057 cites W2041563634 @default.
- W2032255057 cites W2049567338 @default.
- W2032255057 cites W2051808038 @default.
- W2032255057 cites W2058792072 @default.
- W2032255057 cites W2058841200 @default.
- W2032255057 cites W2060898930 @default.
- W2032255057 cites W2063687922 @default.
- W2032255057 cites W2142748006 @default.
- W2032255057 cites W4230053467 @default.
- W2032255057 doi "https://doi.org/10.1088/0022-3735/21/11/005" @default.
- W2032255057 hasPublicationYear "1988" @default.
- W2032255057 type Work @default.
- W2032255057 sameAs 2032255057 @default.
- W2032255057 citedByCount "44" @default.
- W2032255057 crossrefType "journal-article" @default.
- W2032255057 hasAuthorship W2032255057A5049526544 @default.
- W2032255057 hasAuthorship W2032255057A5054968582 @default.
- W2032255057 hasConcept C114793014 @default.
- W2032255057 hasConcept C121332964 @default.
- W2032255057 hasConcept C123408415 @default.
- W2032255057 hasConcept C127313418 @default.
- W2032255057 hasConcept C171250308 @default.
- W2032255057 hasConcept C19067145 @default.
- W2032255057 hasConcept C192562407 @default.
- W2032255057 hasConcept C22423302 @default.
- W2032255057 hasConcept C2778755073 @default.
- W2032255057 hasConcept C2816523 @default.
- W2032255057 hasConcept C49040817 @default.
- W2032255057 hasConcept C61427134 @default.
- W2032255057 hasConcept C61696701 @default.
- W2032255057 hasConcept C62520636 @default.
- W2032255057 hasConcept C64297162 @default.
- W2032255057 hasConcept C97892325 @default.
- W2032255057 hasConceptScore W2032255057C114793014 @default.
- W2032255057 hasConceptScore W2032255057C121332964 @default.
- W2032255057 hasConceptScore W2032255057C123408415 @default.
- W2032255057 hasConceptScore W2032255057C127313418 @default.
- W2032255057 hasConceptScore W2032255057C171250308 @default.
- W2032255057 hasConceptScore W2032255057C19067145 @default.
- W2032255057 hasConceptScore W2032255057C192562407 @default.
- W2032255057 hasConceptScore W2032255057C22423302 @default.
- W2032255057 hasConceptScore W2032255057C2778755073 @default.
- W2032255057 hasConceptScore W2032255057C2816523 @default.
- W2032255057 hasConceptScore W2032255057C49040817 @default.
- W2032255057 hasConceptScore W2032255057C61427134 @default.
- W2032255057 hasConceptScore W2032255057C61696701 @default.
- W2032255057 hasConceptScore W2032255057C62520636 @default.
- W2032255057 hasConceptScore W2032255057C64297162 @default.
- W2032255057 hasConceptScore W2032255057C97892325 @default.
- W2032255057 hasIssue "11" @default.
- W2032255057 hasLocation W20322550571 @default.
- W2032255057 hasOpenAccess W2032255057 @default.
- W2032255057 hasPrimaryLocation W20322550571 @default.
- W2032255057 hasRelatedWork W1978221275 @default.
- W2032255057 hasRelatedWork W2016300130 @default.
- W2032255057 hasRelatedWork W2056727257 @default.
- W2032255057 hasRelatedWork W2074539949 @default.
- W2032255057 hasRelatedWork W2092585016 @default.
- W2032255057 hasRelatedWork W2387417003 @default.
- W2032255057 hasRelatedWork W2766657929 @default.
- W2032255057 hasRelatedWork W2951687997 @default.
- W2032255057 hasRelatedWork W4309941227 @default.
- W2032255057 hasRelatedWork W4321265113 @default.
- W2032255057 hasVolume "21" @default.
- W2032255057 isParatext "false" @default.
- W2032255057 isRetracted "false" @default.
- W2032255057 magId "2032255057" @default.
- W2032255057 workType "article" @default.