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- W2032406305 abstract "• Operation automation in wafer fabrication is important. • How to make wafer start more efficiently (1) Wafer start automation. (2) Dynamic wafer start input." @default.
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- W2032406305 date "2011-11-28" @default.
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- W2032406305 title "Wafer start automation with TOC to enhance cycle time control" @default.
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