FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2032472512> ?p ?o ?g. }

• W2032472512 endingPage "156" @default.
• W2032472512 startingPage "151" @default.
• W2032472512 abstract "The surface waviness with concentric circular pattern is generated on highly-boron-doped Si wafer by chemical–mechanical polishing (CMP) with amine system polishing slurry. To investigate the generation mechanism of the waviness, the mechanical and chemical characteristics were clarified using the silicon crystal samples with various boron concentration level ranging from 2.9 × 1017 cm−3 to 1.3 × 1020 cm−3. The conventional silicon substrate used as epitaxial wafer has boron concentration of about 2.5 × 1018 cm−3, a region at which the radical change of etching rate is induced with amine system chemical reagent. The mechanical micro-hardness of highly-boron-doped Si is 30% higher than that of lightly-doped Si. It is found that SiB bond in crystal lattice is firmed up and stabilized for mechanical stress and chemical reaction. To cancel the difference in CMP rate based on boron concentration deviation, increasing the mechanical action in CMP was proposed and performed. The precision CMP was performed using the harder polishing pad and a smooth surface without waviness was obtained." @default.
• W2032472512 created "2016-06-24" @default.
• W2032472512 creator A5028266072 @default.
• W2032472512 creator A5036355101 @default.
• W2032472512 creator A5036881002 @default.
• W2032472512 creator A5037204781 @default.
• W2032472512 creator A5039939755 @default.
• W2032472512 creator A5049474902 @default.
• W2032472512 creator A5066055821 @default.
• W2032472512 creator A5076538595 @default.
• W2032472512 creator A5087483815 @default.
• W2032472512 date "2005-04-01" @default.
• W2032472512 modified "2023-09-30" @default.
• W2032472512 title "High precision chemical mechanical polishing of highly-boron-doped Si wafer used for epitaxial substrate" @default.
• W2032472512 cites W1568890842 @default.
• W2032472512 cites W1640757050 @default.
• W2032472512 cites W1970330378 @default.
• W2032472512 cites W1996507541 @default.
• W2032472512 cites W2045349660 @default.
• W2032472512 cites W2048671991 @default.
• W2032472512 cites W2050209660 @default.
• W2032472512 cites W2076120794 @default.
• W2032472512 cites W2172702113 @default.
• W2032472512 doi "https://doi.org/10.1016/j.precisioneng.2004.06.006" @default.
• W2032472512 hasPublicationYear "2005" @default.
• W2032472512 type Work @default.
• W2032472512 sameAs 2032472512 @default.
• W2032472512 citedByCount "8" @default.
• W2032472512 countsByYear W20324725122014 @default.
• W2032472512 countsByYear W20324725122015 @default.
• W2032472512 countsByYear W20324725122016 @default.
• W2032472512 countsByYear W20324725122017 @default.
• W2032472512 crossrefType "journal-article" @default.
• W2032472512 hasAuthorship W2032472512A5028266072 @default.
• W2032472512 hasAuthorship W2032472512A5036355101 @default.
• W2032472512 hasAuthorship W2032472512A5036881002 @default.
• W2032472512 hasAuthorship W2032472512A5037204781 @default.
• W2032472512 hasAuthorship W2032472512A5039939755 @default.
• W2032472512 hasAuthorship W2032472512A5049474902 @default.
• W2032472512 hasAuthorship W2032472512A5066055821 @default.
• W2032472512 hasAuthorship W2032472512A5076538595 @default.
• W2032472512 hasAuthorship W2032472512A5087483815 @default.
• W2032472512 hasConcept C100460472 @default.
• W2032472512 hasConcept C110738630 @default.
• W2032472512 hasConcept C111368507 @default.
• W2032472512 hasConcept C127313418 @default.
• W2032472512 hasConcept C127413603 @default.
• W2032472512 hasConcept C138113353 @default.
• W2032472512 hasConcept C159985019 @default.
• W2032472512 hasConcept C160671074 @default.
• W2032472512 hasConcept C178790620 @default.
• W2032472512 hasConcept C180088628 @default.
• W2032472512 hasConcept C185592680 @default.
• W2032472512 hasConcept C192562407 @default.
• W2032472512 hasConcept C199360897 @default.
• W2032472512 hasConcept C2777289219 @default.
• W2032472512 hasConcept C2777701225 @default.
• W2032472512 hasConcept C2779227376 @default.
• W2032472512 hasConcept C2781285689 @default.
• W2032472512 hasConcept C33220542 @default.
• W2032472512 hasConcept C41008148 @default.
• W2032472512 hasConcept C42360764 @default.
• W2032472512 hasConcept C49040817 @default.
• W2032472512 hasConcept C501308230 @default.
• W2032472512 hasConcept C544956773 @default.
• W2032472512 hasConcept C57863236 @default.
• W2032472512 hasConceptScore W2032472512C100460472 @default.
• W2032472512 hasConceptScore W2032472512C110738630 @default.
• W2032472512 hasConceptScore W2032472512C111368507 @default.
• W2032472512 hasConceptScore W2032472512C127313418 @default.
• W2032472512 hasConceptScore W2032472512C127413603 @default.
• W2032472512 hasConceptScore W2032472512C138113353 @default.
• W2032472512 hasConceptScore W2032472512C159985019 @default.
• W2032472512 hasConceptScore W2032472512C160671074 @default.
• W2032472512 hasConceptScore W2032472512C178790620 @default.
• W2032472512 hasConceptScore W2032472512C180088628 @default.
• W2032472512 hasConceptScore W2032472512C185592680 @default.
• W2032472512 hasConceptScore W2032472512C192562407 @default.
• W2032472512 hasConceptScore W2032472512C199360897 @default.
• W2032472512 hasConceptScore W2032472512C2777289219 @default.
• W2032472512 hasConceptScore W2032472512C2777701225 @default.
• W2032472512 hasConceptScore W2032472512C2779227376 @default.
• W2032472512 hasConceptScore W2032472512C2781285689 @default.
• W2032472512 hasConceptScore W2032472512C33220542 @default.
• W2032472512 hasConceptScore W2032472512C41008148 @default.
• W2032472512 hasConceptScore W2032472512C42360764 @default.
• W2032472512 hasConceptScore W2032472512C49040817 @default.
• W2032472512 hasConceptScore W2032472512C501308230 @default.
• W2032472512 hasConceptScore W2032472512C544956773 @default.
• W2032472512 hasConceptScore W2032472512C57863236 @default.
• W2032472512 hasIssue "2" @default.
• W2032472512 hasLocation W20324725121 @default.
• W2032472512 hasOpenAccess W2032472512 @default.
• W2032472512 hasPrimaryLocation W20324725121 @default.
• W2032472512 hasRelatedWork W1968581245 @default.
• W2032472512 hasRelatedWork W2031003934 @default.
• W2032472512 hasRelatedWork W2032472512 @default.
• W2032472512 hasRelatedWork W2047149657 @default.

• next