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- W2032533991 abstract "Amorphous silicon films, grown by low pressure chemical vapour deposition (LPCVD) in a hot-wall reactor at temperatures around and below 500°C and at pressures of 100 mTorr, were investigated using various characterization techniques, to look for possible differences between these films and films grown by LPCVD at higher temperatures and by atmospheric pressure CVD (APCVD). The emphasis was placed on morphological (scanning electron microscopy and X-ray diffraction) and physical characterization (optical absorption, reflectivity, resistivity, Hall mobility and photoconductivity), while the hydrogen profile was measured using the 15N technique. The results indicate physical properties that are quite different from those of other LPCVD and APCVD films, properties which cannot be obtained by a simple extrapolation from higher deposition temperatures and which deserve further detailed investigation." @default.
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- W2032533991 date "1986-08-01" @default.
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- W2032533991 title "Amorphous silicon prepared by low pressure chemical vapour deposition" @default.
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- W2032533991 doi "https://doi.org/10.1016/0040-6090(86)90344-5" @default.
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