Matches in SemOpenAlex for { <https://semopenalex.org/work/W2032895156> ?p ?o ?g. }
- W2032895156 endingPage "250" @default.
- W2032895156 startingPage "244" @default.
- W2032895156 abstract "We report on the structural and electrical properties of iron silicides in the transformation process from ε-FeSi to β-FeSi2 and show the electrical characteristics of heterostructure p-β-Fe0.95Mn0.05Si2/n-Si diodes formed by high-dose Fe+ and Mn+ co-implantation in Si (100). A mixture of polycrystalline ε-FeSi and β-FeSi2 with a thickness of 75 nm and the resistivity of ρ=4.9×10−4 Ω·cm was in-situ formed during Fe+-implantation in Si (100) at 350°C. These samples were annealed at Ta=400–1100°C and characterized by Rutherford backscattering spectrometry, van der Pauw and X-ray diffraction. Single β-FeSi2 layers with ρ=0.31 Ω·cm were formed after annealing at Ta =600°C. Although the samples with Ta<600°C exhibited p-type conductivity (hole concentrations of p=5.3–11×1020 cm−3 and hole mobilities of μh=8.7–32 cm2/V/s), the samples with Ta≧600°C presented n-type conductivity (n=4.2–14×1016 cm−3 and μe=220–520 cm2/V/s). The origin of p-type conductivity may be due to contribution of Fe-rich β-FeSi2, while that of the electron carrier could be related to the formation of stoichiometric β-FeSi2, in which the predominant impurity phosphorous atoms remaining in the n-Si substrates could be electrically activated as donors in β-FeSi2 by high-temperature annealing. The I–V and C–V characteristics of the p-β-Fe0.95Mn0.05Si2/n-Si(100) diodes indicated that the impurity distribution of the pn junction is linearly graded, which leads to a high ideality factor of η=4.4." @default.
- W2032895156 created "2016-06-24" @default.
- W2032895156 creator A5006660982 @default.
- W2032895156 creator A5011612745 @default.
- W2032895156 creator A5015656019 @default.
- W2032895156 creator A5049244385 @default.
- W2032895156 creator A5050515840 @default.
- W2032895156 creator A5053659687 @default.
- W2032895156 creator A5071483908 @default.
- W2032895156 creator A5075452370 @default.
- W2032895156 creator A5087337770 @default.
- W2032895156 date "2001-01-01" @default.
- W2032895156 modified "2023-09-26" @default.
- W2032895156 title "Fabrication of heterostructure p-β-Fe0.95Mn0.05Si2/n-Si diodes by Fe+ and Mn+ co-implantation in Si(100) substrates" @default.
- W2032895156 cites W1667424009 @default.
- W2032895156 cites W1983388363 @default.
- W2032895156 cites W1983542408 @default.
- W2032895156 cites W1984443950 @default.
- W2032895156 cites W1986139421 @default.
- W2032895156 cites W1992939988 @default.
- W2032895156 cites W1993113345 @default.
- W2032895156 cites W2007091047 @default.
- W2032895156 cites W2011691032 @default.
- W2032895156 cites W2013291837 @default.
- W2032895156 cites W2018463610 @default.
- W2032895156 cites W2018674170 @default.
- W2032895156 cites W2021002267 @default.
- W2032895156 cites W2022008896 @default.
- W2032895156 cites W2024143702 @default.
- W2032895156 cites W2060579144 @default.
- W2032895156 cites W2062497809 @default.
- W2032895156 cites W2064583797 @default.
- W2032895156 cites W2065226534 @default.
- W2032895156 cites W2068569080 @default.
- W2032895156 cites W2099991549 @default.
- W2032895156 cites W2108159233 @default.
- W2032895156 cites W2275665669 @default.
- W2032895156 cites W2315628665 @default.
- W2032895156 cites W2322474346 @default.
- W2032895156 doi "https://doi.org/10.1016/s0040-6090(00)01751-x" @default.
- W2032895156 hasPublicationYear "2001" @default.
- W2032895156 type Work @default.
- W2032895156 sameAs 2032895156 @default.
- W2032895156 citedByCount "13" @default.
- W2032895156 countsByYear W20328951562012 @default.
- W2032895156 countsByYear W20328951562023 @default.
- W2032895156 crossrefType "journal-article" @default.
- W2032895156 hasAuthorship W2032895156A5006660982 @default.
- W2032895156 hasAuthorship W2032895156A5011612745 @default.
- W2032895156 hasAuthorship W2032895156A5015656019 @default.
- W2032895156 hasAuthorship W2032895156A5049244385 @default.
- W2032895156 hasAuthorship W2032895156A5050515840 @default.
- W2032895156 hasAuthorship W2032895156A5053659687 @default.
- W2032895156 hasAuthorship W2032895156A5071483908 @default.
- W2032895156 hasAuthorship W2032895156A5075452370 @default.
- W2032895156 hasAuthorship W2032895156A5087337770 @default.
- W2032895156 hasConcept C113196181 @default.
- W2032895156 hasConcept C119599485 @default.
- W2032895156 hasConcept C127413603 @default.
- W2032895156 hasConcept C131540310 @default.
- W2032895156 hasConcept C134112204 @default.
- W2032895156 hasConcept C137637335 @default.
- W2032895156 hasConcept C144082473 @default.
- W2032895156 hasConcept C147789679 @default.
- W2032895156 hasConcept C171250308 @default.
- W2032895156 hasConcept C178790620 @default.
- W2032895156 hasConcept C185592680 @default.
- W2032895156 hasConcept C19067145 @default.
- W2032895156 hasConcept C191897082 @default.
- W2032895156 hasConcept C192562407 @default.
- W2032895156 hasConcept C2777855556 @default.
- W2032895156 hasConcept C2780547777 @default.
- W2032895156 hasConcept C43617362 @default.
- W2032895156 hasConcept C49040817 @default.
- W2032895156 hasConcept C69990965 @default.
- W2032895156 hasConcept C71987851 @default.
- W2032895156 hasConcept C78434282 @default.
- W2032895156 hasConcept C79794668 @default.
- W2032895156 hasConcept C8010536 @default.
- W2032895156 hasConcept C85443114 @default.
- W2032895156 hasConceptScore W2032895156C113196181 @default.
- W2032895156 hasConceptScore W2032895156C119599485 @default.
- W2032895156 hasConceptScore W2032895156C127413603 @default.
- W2032895156 hasConceptScore W2032895156C131540310 @default.
- W2032895156 hasConceptScore W2032895156C134112204 @default.
- W2032895156 hasConceptScore W2032895156C137637335 @default.
- W2032895156 hasConceptScore W2032895156C144082473 @default.
- W2032895156 hasConceptScore W2032895156C147789679 @default.
- W2032895156 hasConceptScore W2032895156C171250308 @default.
- W2032895156 hasConceptScore W2032895156C178790620 @default.
- W2032895156 hasConceptScore W2032895156C185592680 @default.
- W2032895156 hasConceptScore W2032895156C19067145 @default.
- W2032895156 hasConceptScore W2032895156C191897082 @default.
- W2032895156 hasConceptScore W2032895156C192562407 @default.
- W2032895156 hasConceptScore W2032895156C2777855556 @default.
- W2032895156 hasConceptScore W2032895156C2780547777 @default.
- W2032895156 hasConceptScore W2032895156C43617362 @default.
- W2032895156 hasConceptScore W2032895156C49040817 @default.