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• W2032936195 abstract "SummaryIt is clear that a number of factors must be considered in the analysis of opticalcoatings and surfaces. Each technique imposes its own limitations on the quality of thesurface analysis. Of particluar concern are the detection limits, the spatial resolution,the ability to obtain chemical and /or quantitative information, and the ex-cant of chargingand beam damage. Although it is not possible to identify the ideal technique, the particu-lar advantages of each method should be noted. In many instances, complementary analyseswith two or more techniques may be required.Perhaps the major advantages of AES are the capability for microanalysis and the speedwith which an analysis can be performed. This latter point refers not only to the rate ofdata accumulation and the depth profiling, but also to the relative ease of data inter-pretation and quantitative analysis. Unfortunately, the electron beam used in AES can leadto charging, electromigration, desorption and heating when applied to insulating films andsurfaces. These may or may not be detrimental effects depending upon the particular sampleand the information desired.The main advantage of XPS is the ability to extract chemical bonding information fromthe photoelectron spectra. Also, the passive nature of the x -ray beam used in XPS is anadditional advantage for examining dielectric materials since it does not introduce severecharging or sample damage. Perhaps a major disadvantage of both AES and XPS is theirdetection sensitivity which is limited to approximately 0.1 atomic percent for most elementsunder routine operating conditions. It is the ability to detect many elements in the ppmrange which makes SIMS complementary to AES and XPS. In many instances, SIMS is utilizedto perform trace element analysis in 'bulk'.While these techniques are most often utilized where surface and thin film characteriza-tion is required, an alternative motive has been light - element detection, in general. AESand XPS can detect all elements except hydrogen and helium. SIMS can detect all elementsincluding hydrogen; the ability to analyze for hydrogen has been a strong driving force inthe development of SIMS.In reality, one is often forced to cope with limitations of one sort or another. In thecase of optical coatings and surfaces, this is often due to the special problems associatedwith the sensitivity of insulators to the charged particle beam probes. Thus, it isabsolutely crucial that the data be interpreted with regard to these limitations." @default.
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• W2032936195 date "1983-11-10" @default.
• W2032936195 modified "2023-09-23" @default.
• W2032936195 title "<title>Chemical Analysis Of Optical Coatings And Surfaces</title>" @default.
• W2032936195 doi "https://doi.org/10.1117/12.934849" @default.
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