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- W2032942120 abstract "Cubic polytypes of SiC, GaN and AlN were grown on silicon by molecular beam epitaxy. The mechanical properties of the epitaxial layers were investigated by nanoindentation. For 3C-SiC grown on Si(111) and Si(100) a dependence of the mechanical properties on the surface preparation with germanium prior to the carbonization was obtained." @default.
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- W2032942120 date "2012-05-01" @default.
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- W2032942120 title "Mechanical Properties of Cubic SiC, GaN and AlN Thin Films" @default.
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- W2032942120 doi "https://doi.org/10.4028/www.scientific.net/msf.717-720.513" @default.
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