Matches in SemOpenAlex for { <https://semopenalex.org/work/W2032952693> ?p ?o ?g. }
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94
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- W2032952693 endingPage "76" @default.
- W2032952693 startingPage "70" @default.
- W2032952693 abstract "The optical interferometry systems are widely used for surface metrology. However, the environmental noise and the data analysis approach can limit the measurement performance during in- process inspection. This paper introduces a wavelength scanning interferometer (WSI) for micro and nano-scale areal surface measurement. The WSI can measure large discontinuous surface profiles without phase ambiguity problems. The proposed WSI is immune to environmental noise using an active servo control system that serves as a phase compensating mechanism. Furthermore, a parallel CUDA programming model is presented as a solution to accelerate the computing analysis. The presented system can be used for on-line or in-process measurement on the shop floor." @default.
- W2032952693 created "2016-06-24" @default.
- W2032952693 creator A5016818731 @default.
- W2032952693 creator A5031846848 @default.
- W2032952693 creator A5050515041 @default.
- W2032952693 date "2013-01-01" @default.
- W2032952693 modified "2023-10-16" @default.
- W2032952693 title "Accelerated Surface Measurement Using Wavelength Scanning Interferometer with Compensation of Environmental Noise" @default.
- W2032952693 cites W2072795708 @default.
- W2032952693 cites W2084349857 @default.
- W2032952693 cites W2170598476 @default.
- W2032952693 doi "https://doi.org/10.1016/j.procir.2013.08.014" @default.
- W2032952693 hasPublicationYear "2013" @default.
- W2032952693 type Work @default.
- W2032952693 sameAs 2032952693 @default.
- W2032952693 citedByCount "17" @default.
- W2032952693 countsByYear W20329526932014 @default.
- W2032952693 countsByYear W20329526932015 @default.
- W2032952693 countsByYear W20329526932018 @default.
- W2032952693 countsByYear W20329526932019 @default.
- W2032952693 countsByYear W20329526932020 @default.
- W2032952693 countsByYear W20329526932021 @default.
- W2032952693 countsByYear W20329526932022 @default.
- W2032952693 crossrefType "journal-article" @default.
- W2032952693 hasAuthorship W2032952693A5016818731 @default.
- W2032952693 hasAuthorship W2032952693A5031846848 @default.
- W2032952693 hasAuthorship W2032952693A5050515041 @default.
- W2032952693 hasBestOaLocation W20329526931 @default.
- W2032952693 hasConcept C11171543 @default.
- W2032952693 hasConcept C111919701 @default.
- W2032952693 hasConcept C115961682 @default.
- W2032952693 hasConcept C120665830 @default.
- W2032952693 hasConcept C121332964 @default.
- W2032952693 hasConcept C127413603 @default.
- W2032952693 hasConcept C155386361 @default.
- W2032952693 hasConcept C15744967 @default.
- W2032952693 hasConcept C166689943 @default.
- W2032952693 hasConcept C195766429 @default.
- W2032952693 hasConcept C24326235 @default.
- W2032952693 hasConcept C2780009758 @default.
- W2032952693 hasConcept C2780023022 @default.
- W2032952693 hasConcept C31972630 @default.
- W2032952693 hasConcept C41008148 @default.
- W2032952693 hasConcept C44280652 @default.
- W2032952693 hasConcept C62520636 @default.
- W2032952693 hasConcept C6260449 @default.
- W2032952693 hasConcept C77088390 @default.
- W2032952693 hasConcept C89631360 @default.
- W2032952693 hasConcept C98045186 @default.
- W2032952693 hasConcept C99498987 @default.
- W2032952693 hasConceptScore W2032952693C11171543 @default.
- W2032952693 hasConceptScore W2032952693C111919701 @default.
- W2032952693 hasConceptScore W2032952693C115961682 @default.
- W2032952693 hasConceptScore W2032952693C120665830 @default.
- W2032952693 hasConceptScore W2032952693C121332964 @default.
- W2032952693 hasConceptScore W2032952693C127413603 @default.
- W2032952693 hasConceptScore W2032952693C155386361 @default.
- W2032952693 hasConceptScore W2032952693C15744967 @default.
- W2032952693 hasConceptScore W2032952693C166689943 @default.
- W2032952693 hasConceptScore W2032952693C195766429 @default.
- W2032952693 hasConceptScore W2032952693C24326235 @default.
- W2032952693 hasConceptScore W2032952693C2780009758 @default.
- W2032952693 hasConceptScore W2032952693C2780023022 @default.
- W2032952693 hasConceptScore W2032952693C31972630 @default.
- W2032952693 hasConceptScore W2032952693C41008148 @default.
- W2032952693 hasConceptScore W2032952693C44280652 @default.
- W2032952693 hasConceptScore W2032952693C62520636 @default.
- W2032952693 hasConceptScore W2032952693C6260449 @default.
- W2032952693 hasConceptScore W2032952693C77088390 @default.
- W2032952693 hasConceptScore W2032952693C89631360 @default.
- W2032952693 hasConceptScore W2032952693C98045186 @default.
- W2032952693 hasConceptScore W2032952693C99498987 @default.
- W2032952693 hasLocation W20329526931 @default.
- W2032952693 hasLocation W20329526932 @default.
- W2032952693 hasLocation W20329526933 @default.
- W2032952693 hasOpenAccess W2032952693 @default.
- W2032952693 hasPrimaryLocation W20329526931 @default.
- W2032952693 hasRelatedWork W1966176431 @default.
- W2032952693 hasRelatedWork W2001195527 @default.
- W2032952693 hasRelatedWork W2001966778 @default.
- W2032952693 hasRelatedWork W2033686348 @default.
- W2032952693 hasRelatedWork W2060621643 @default.
- W2032952693 hasRelatedWork W2151080099 @default.
- W2032952693 hasRelatedWork W2326273876 @default.
- W2032952693 hasRelatedWork W2333321165 @default.
- W2032952693 hasRelatedWork W2793377474 @default.
- W2032952693 hasRelatedWork W2897720152 @default.
- W2032952693 hasVolume "10" @default.
- W2032952693 isParatext "false" @default.
- W2032952693 isRetracted "false" @default.
- W2032952693 magId "2032952693" @default.
- W2032952693 workType "article" @default.