Matches in SemOpenAlex for { <https://semopenalex.org/work/W2033028035> ?p ?o ?g. }
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with 100 items per page.
- W2033028035 endingPage "265" @default.
- W2033028035 startingPage "256" @default.
- W2033028035 abstract "Several barriers exist to the development and optimization of high frequency Micro-Electro-Mechanical (MEMS) resonators, primarily adequate control and understanding of dissipation phenomena. There is growing experimental evidence that anchor losses contribute significantly to damping. A reliable, large scale and native 3D numerical approach for estimating the anchor loss contribution in general is hence a much demanded tool. In this paper we discuss the implementation of a PML approach to simulate dissipation of waves radiated from the anchor into the substrate and provide several guidelines for a robust application to micro-structures. Next we employ the codes developed to perform extensive benchmarks against analytical solutions and verify the applicability of possible simplifications. In particular we show that the commonly adopted decoupling assumption between the resonator and the substrate might induce severe errors especially in 2D." @default.
- W2033028035 created "2016-06-24" @default.
- W2033028035 creator A5015046615 @default.
- W2033028035 creator A5021800232 @default.
- W2033028035 creator A5032540213 @default.
- W2033028035 creator A5063415920 @default.
- W2033028035 date "2013-01-01" @default.
- W2033028035 modified "2023-10-15" @default.
- W2033028035 title "Validation of PML-based models for the evaluation of anchor dissipation in MEMS resonators" @default.
- W2033028035 cites W1963927909 @default.
- W2033028035 cites W1965906410 @default.
- W2033028035 cites W1969277629 @default.
- W2033028035 cites W1971787972 @default.
- W2033028035 cites W1977794655 @default.
- W2033028035 cites W2002363316 @default.
- W2033028035 cites W2003017040 @default.
- W2033028035 cites W2003331814 @default.
- W2033028035 cites W2012029480 @default.
- W2033028035 cites W2012105116 @default.
- W2033028035 cites W2053183483 @default.
- W2033028035 cites W2092674522 @default.
- W2033028035 cites W2110391438 @default.
- W2033028035 cites W2112311198 @default.
- W2033028035 cites W2124224937 @default.
- W2033028035 cites W2134672263 @default.
- W2033028035 cites W2141610848 @default.
- W2033028035 cites W2143760842 @default.
- W2033028035 cites W2156065590 @default.
- W2033028035 cites W2158353346 @default.
- W2033028035 cites W2166695689 @default.
- W2033028035 cites W2539821348 @default.
- W2033028035 cites W4231805235 @default.
- W2033028035 doi "https://doi.org/10.1016/j.euromechsol.2012.06.008" @default.
- W2033028035 hasPublicationYear "2013" @default.
- W2033028035 type Work @default.
- W2033028035 sameAs 2033028035 @default.
- W2033028035 citedByCount "55" @default.
- W2033028035 countsByYear W20330280352012 @default.
- W2033028035 countsByYear W20330280352013 @default.
- W2033028035 countsByYear W20330280352014 @default.
- W2033028035 countsByYear W20330280352015 @default.
- W2033028035 countsByYear W20330280352016 @default.
- W2033028035 countsByYear W20330280352017 @default.
- W2033028035 countsByYear W20330280352018 @default.
- W2033028035 countsByYear W20330280352019 @default.
- W2033028035 countsByYear W20330280352020 @default.
- W2033028035 countsByYear W20330280352021 @default.
- W2033028035 countsByYear W20330280352022 @default.
- W2033028035 countsByYear W20330280352023 @default.
- W2033028035 crossrefType "journal-article" @default.
- W2033028035 hasAuthorship W2033028035A5015046615 @default.
- W2033028035 hasAuthorship W2033028035A5021800232 @default.
- W2033028035 hasAuthorship W2033028035A5032540213 @default.
- W2033028035 hasAuthorship W2033028035A5063415920 @default.
- W2033028035 hasConcept C119599485 @default.
- W2033028035 hasConcept C121332964 @default.
- W2033028035 hasConcept C127413603 @default.
- W2033028035 hasConcept C133731056 @default.
- W2033028035 hasConcept C135402231 @default.
- W2033028035 hasConcept C171250308 @default.
- W2033028035 hasConcept C192562407 @default.
- W2033028035 hasConcept C205606062 @default.
- W2033028035 hasConcept C24326235 @default.
- W2033028035 hasConcept C37977207 @default.
- W2033028035 hasConcept C41008148 @default.
- W2033028035 hasConcept C97126364 @default.
- W2033028035 hasConcept C97355855 @default.
- W2033028035 hasConceptScore W2033028035C119599485 @default.
- W2033028035 hasConceptScore W2033028035C121332964 @default.
- W2033028035 hasConceptScore W2033028035C127413603 @default.
- W2033028035 hasConceptScore W2033028035C133731056 @default.
- W2033028035 hasConceptScore W2033028035C135402231 @default.
- W2033028035 hasConceptScore W2033028035C171250308 @default.
- W2033028035 hasConceptScore W2033028035C192562407 @default.
- W2033028035 hasConceptScore W2033028035C205606062 @default.
- W2033028035 hasConceptScore W2033028035C24326235 @default.
- W2033028035 hasConceptScore W2033028035C37977207 @default.
- W2033028035 hasConceptScore W2033028035C41008148 @default.
- W2033028035 hasConceptScore W2033028035C97126364 @default.
- W2033028035 hasConceptScore W2033028035C97355855 @default.
- W2033028035 hasLocation W20330280351 @default.
- W2033028035 hasOpenAccess W2033028035 @default.
- W2033028035 hasPrimaryLocation W20330280351 @default.
- W2033028035 hasRelatedWork W2079984045 @default.
- W2033028035 hasRelatedWork W2120483398 @default.
- W2033028035 hasRelatedWork W2152087047 @default.
- W2033028035 hasRelatedWork W2152950565 @default.
- W2033028035 hasRelatedWork W2272290532 @default.
- W2033028035 hasRelatedWork W2347486132 @default.
- W2033028035 hasRelatedWork W2350340797 @default.
- W2033028035 hasRelatedWork W2537716684 @default.
- W2033028035 hasRelatedWork W2587892165 @default.
- W2033028035 hasRelatedWork W4293224283 @default.
- W2033028035 hasVolume "37" @default.
- W2033028035 isParatext "false" @default.
- W2033028035 isRetracted "false" @default.
- W2033028035 magId "2033028035" @default.
- W2033028035 workType "article" @default.