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- W2033057460 abstract "The introduction of 300 mm wafers into integrated circuit manufacturing will affect the design of the fabs. This paper covers the expectations of IC manufacturers and the progress in technology with respect to the fab itself and automation systems. The fab design is affected by the future use of closed wafer carriers, a consequent automation strategy, new challenges in contamination control, and the increased importance of environmental aspects. It will be described how these factors influence the fab design and the status of the discussed technologies." @default.
- W2033057460 created "2016-06-24" @default.
- W2033057460 creator A5011534196 @default.
- W2033057460 creator A5014438674 @default.
- W2033057460 date "1999-07-01" @default.
- W2033057460 modified "2023-09-26" @default.
- W2033057460 title "Automation and fab concepts for 300 mm wafer manufacturing" @default.
- W2033057460 doi "https://doi.org/10.1016/s0167-9317(99)00092-1" @default.
- W2033057460 hasPublicationYear "1999" @default.
- W2033057460 type Work @default.
- W2033057460 sameAs 2033057460 @default.
- W2033057460 citedByCount "3" @default.
- W2033057460 crossrefType "journal-article" @default.
- W2033057460 hasAuthorship W2033057460A5011534196 @default.
- W2033057460 hasAuthorship W2033057460A5014438674 @default.
- W2033057460 hasConcept C115901376 @default.
- W2033057460 hasConcept C117671659 @default.
- W2033057460 hasConcept C127413603 @default.
- W2033057460 hasConcept C160671074 @default.
- W2033057460 hasConcept C171250308 @default.
- W2033057460 hasConcept C192562407 @default.
- W2033057460 hasConcept C201995342 @default.
- W2033057460 hasConcept C21880701 @default.
- W2033057460 hasConcept C41008148 @default.
- W2033057460 hasConcept C78519656 @default.
- W2033057460 hasConceptScore W2033057460C115901376 @default.
- W2033057460 hasConceptScore W2033057460C117671659 @default.
- W2033057460 hasConceptScore W2033057460C127413603 @default.
- W2033057460 hasConceptScore W2033057460C160671074 @default.
- W2033057460 hasConceptScore W2033057460C171250308 @default.
- W2033057460 hasConceptScore W2033057460C192562407 @default.
- W2033057460 hasConceptScore W2033057460C201995342 @default.
- W2033057460 hasConceptScore W2033057460C21880701 @default.
- W2033057460 hasConceptScore W2033057460C41008148 @default.
- W2033057460 hasConceptScore W2033057460C78519656 @default.
- W2033057460 hasLocation W20330574601 @default.
- W2033057460 hasOpenAccess W2033057460 @default.
- W2033057460 hasPrimaryLocation W20330574601 @default.
- W2033057460 hasRelatedWork W1503850201 @default.
- W2033057460 hasRelatedWork W1505698635 @default.
- W2033057460 hasRelatedWork W1573203268 @default.
- W2033057460 hasRelatedWork W1635818937 @default.
- W2033057460 hasRelatedWork W1727553540 @default.
- W2033057460 hasRelatedWork W1830776359 @default.
- W2033057460 hasRelatedWork W1902403142 @default.
- W2033057460 hasRelatedWork W2059502728 @default.
- W2033057460 hasRelatedWork W2065623256 @default.
- W2033057460 hasRelatedWork W2121870611 @default.
- W2033057460 hasRelatedWork W2151437435 @default.
- W2033057460 hasRelatedWork W2157730875 @default.
- W2033057460 hasRelatedWork W2158486846 @default.
- W2033057460 hasRelatedWork W2381957222 @default.
- W2033057460 hasRelatedWork W2385024086 @default.
- W2033057460 hasRelatedWork W2534088041 @default.
- W2033057460 hasRelatedWork W2537014484 @default.
- W2033057460 hasRelatedWork W813826466 @default.
- W2033057460 hasRelatedWork W1922244321 @default.
- W2033057460 hasRelatedWork W2523912951 @default.
- W2033057460 isParatext "false" @default.
- W2033057460 isRetracted "false" @default.
- W2033057460 magId "2033057460" @default.
- W2033057460 workType "article" @default.