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- W2033185418 endingPage "L488" @default.
- W2033185418 startingPage "L488" @default.
- W2033185418 abstract "The effect of melt stoichiometry on the carrier profiles in Si-implanted layers has been investigated for undoped, semi-insulating LEC GaAs grown from melts of different compositions. The electrical activation efficiency tends to increase as the crystals become As-rich. The carrier profile uniformity of the implanted layer across the wafers also depends on the melt stoichiometry. The most uniform distribution of the carrier profiles is obtained for GaAs ingots grown from melts of nearly stoichiometric composition ( x =0.499 to 0.505). These results demostrate the importance of stoichiometry control in reproducible LEC growth of GaAs which permits formation of electrically uniform Si-implanted layers." @default.
- W2033185418 created "2016-06-24" @default.
- W2033185418 creator A5003452129 @default.
- W2033185418 creator A5019561119 @default.
- W2033185418 creator A5030517670 @default.
- W2033185418 creator A5039294290 @default.
- W2033185418 creator A5040191987 @default.
- W2033185418 creator A5049054004 @default.
- W2033185418 creator A5085230995 @default.
- W2033185418 date "1985-07-01" @default.
- W2033185418 modified "2023-09-22" @default.
- W2033185418 title "Effect of Melt Stoichiometry on Electrical Activation Uniformity of Si-Implanted Layers in Undoped Semi-Insulating GaAs" @default.
- W2033185418 cites W1973272177 @default.
- W2033185418 cites W2010761672 @default.
- W2033185418 cites W2012820291 @default.
- W2033185418 cites W2024642814 @default.
- W2033185418 cites W2025681137 @default.
- W2033185418 cites W2057021390 @default.
- W2033185418 cites W2070518987 @default.
- W2033185418 cites W2082598217 @default.
- W2033185418 cites W2092896488 @default.
- W2033185418 cites W2131588353 @default.
- W2033185418 cites W2133155345 @default.
- W2033185418 doi "https://doi.org/10.1143/jjap.24.l488" @default.
- W2033185418 hasPublicationYear "1985" @default.
- W2033185418 type Work @default.
- W2033185418 sameAs 2033185418 @default.
- W2033185418 citedByCount "17" @default.
- W2033185418 crossrefType "journal-article" @default.
- W2033185418 hasAuthorship W2033185418A5003452129 @default.
- W2033185418 hasAuthorship W2033185418A5019561119 @default.
- W2033185418 hasAuthorship W2033185418A5030517670 @default.
- W2033185418 hasAuthorship W2033185418A5039294290 @default.
- W2033185418 hasAuthorship W2033185418A5040191987 @default.
- W2033185418 hasAuthorship W2033185418A5049054004 @default.
- W2033185418 hasAuthorship W2033185418A5085230995 @default.
- W2033185418 hasConcept C113196181 @default.
- W2033185418 hasConcept C144082473 @default.
- W2033185418 hasConcept C147789679 @default.
- W2033185418 hasConcept C160671074 @default.
- W2033185418 hasConcept C171250308 @default.
- W2033185418 hasConcept C185592680 @default.
- W2033185418 hasConcept C192562407 @default.
- W2033185418 hasConcept C2779227376 @default.
- W2033185418 hasConcept C43617362 @default.
- W2033185418 hasConcept C49040817 @default.
- W2033185418 hasConceptScore W2033185418C113196181 @default.
- W2033185418 hasConceptScore W2033185418C144082473 @default.
- W2033185418 hasConceptScore W2033185418C147789679 @default.
- W2033185418 hasConceptScore W2033185418C160671074 @default.
- W2033185418 hasConceptScore W2033185418C171250308 @default.
- W2033185418 hasConceptScore W2033185418C185592680 @default.
- W2033185418 hasConceptScore W2033185418C192562407 @default.
- W2033185418 hasConceptScore W2033185418C2779227376 @default.
- W2033185418 hasConceptScore W2033185418C43617362 @default.
- W2033185418 hasConceptScore W2033185418C49040817 @default.
- W2033185418 hasIssue "7A" @default.
- W2033185418 hasLocation W20331854181 @default.
- W2033185418 hasOpenAccess W2033185418 @default.
- W2033185418 hasPrimaryLocation W20331854181 @default.
- W2033185418 hasRelatedWork W1972216760 @default.
- W2033185418 hasRelatedWork W2024846217 @default.
- W2033185418 hasRelatedWork W2034833668 @default.
- W2033185418 hasRelatedWork W2058676402 @default.
- W2033185418 hasRelatedWork W2160913304 @default.
- W2033185418 hasRelatedWork W2299312516 @default.
- W2033185418 hasRelatedWork W2329285141 @default.
- W2033185418 hasRelatedWork W2902546961 @default.
- W2033185418 hasRelatedWork W2961581639 @default.
- W2033185418 hasRelatedWork W4313653414 @default.
- W2033185418 hasVolume "24" @default.
- W2033185418 isParatext "false" @default.
- W2033185418 isRetracted "false" @default.
- W2033185418 magId "2033185418" @default.
- W2033185418 workType "article" @default.