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- W2033202203 endingPage "771" @default.
- W2033202203 startingPage "769" @default.
- W2033202203 abstract "Heteroepitaxy of Si1−xGex/Si alloy layers on Si (100) substrates has been achieved using pulsed laser induced epitaxy (PLIE). The energy of 1 to 20 pulses from a spatially homogenized XeCl excimer laser beam is used to melt a structure consisting of electron-beam evaporated Ge on Si (100) substrates. Alloy films with different Ge fractions are investigated and films with up to 21% Ge content are found to exhibit excellent crystallinity, as confirmed by MeV-ion channeling along the 〈100〉 direction. MeV-ion channeling is also used to determine the level of strain in the layers. This is done by comparing angular yield curves around the 〈110〉 direction for the substrate and alloy layer. The strain values obtained match with calculations for an ideally strained layer state. The strain is also measured for layers that have been subjected to different thermal cycles. A high level of strain is preserved in the alloy layer even after heating to 950 °C for 1 h. This unusual thermal stability is believed to be due to two process features, the ultrarapid nature of the process and the interfacial grading of the Ge fraction created during the melt-regrowth process." @default.
- W2033202203 created "2016-06-24" @default.
- W2033202203 creator A5045667688 @default.
- W2033202203 creator A5050568452 @default.
- W2033202203 creator A5059032270 @default.
- W2033202203 creator A5003319528 @default.
- W2033202203 date "1992-08-17" @default.
- W2033202203 modified "2023-09-23" @default.
- W2033202203 title "Crystallinity, strain, and thermal stability of heteroepitaxial Si1−<i>x</i>Ge<i>x</i>/Si (100) layers created using pulsed laser induced epitaxy" @default.
- W2033202203 cites W1741840575 @default.
- W2033202203 cites W1990772164 @default.
- W2033202203 cites W1991641724 @default.
- W2033202203 cites W1993712129 @default.
- W2033202203 cites W2010389318 @default.
- W2033202203 cites W2025972587 @default.
- W2033202203 cites W2042570924 @default.
- W2033202203 cites W2045679976 @default.
- W2033202203 cites W2046164621 @default.
- W2033202203 cites W2051413367 @default.
- W2033202203 cites W2057564411 @default.
- W2033202203 cites W2068224052 @default.
- W2033202203 cites W2080313611 @default.
- W2033202203 doi "https://doi.org/10.1063/1.107793" @default.
- W2033202203 hasPublicationYear "1992" @default.
- W2033202203 type Work @default.
- W2033202203 sameAs 2033202203 @default.
- W2033202203 citedByCount "27" @default.
- W2033202203 countsByYear W20332022032012 @default.
- W2033202203 countsByYear W20332022032023 @default.
- W2033202203 crossrefType "journal-article" @default.
- W2033202203 hasAuthorship W2033202203A5003319528 @default.
- W2033202203 hasAuthorship W2033202203A5045667688 @default.
- W2033202203 hasAuthorship W2033202203A5050568452 @default.
- W2033202203 hasAuthorship W2033202203A5059032270 @default.
- W2033202203 hasConcept C110738630 @default.
- W2033202203 hasConcept C113196181 @default.
- W2033202203 hasConcept C120665830 @default.
- W2033202203 hasConcept C121332964 @default.
- W2033202203 hasConcept C127413603 @default.
- W2033202203 hasConcept C159985019 @default.
- W2033202203 hasConcept C171250308 @default.
- W2033202203 hasConcept C185592680 @default.
- W2033202203 hasConcept C19067145 @default.
- W2033202203 hasConcept C192562407 @default.
- W2033202203 hasConcept C2779227376 @default.
- W2033202203 hasConcept C2780026712 @default.
- W2033202203 hasConcept C2780477314 @default.
- W2033202203 hasConcept C3792809 @default.
- W2033202203 hasConcept C42360764 @default.
- W2033202203 hasConcept C43617362 @default.
- W2033202203 hasConcept C46275449 @default.
- W2033202203 hasConcept C520434653 @default.
- W2033202203 hasConcept C59061564 @default.
- W2033202203 hasConceptScore W2033202203C110738630 @default.
- W2033202203 hasConceptScore W2033202203C113196181 @default.
- W2033202203 hasConceptScore W2033202203C120665830 @default.
- W2033202203 hasConceptScore W2033202203C121332964 @default.
- W2033202203 hasConceptScore W2033202203C127413603 @default.
- W2033202203 hasConceptScore W2033202203C159985019 @default.
- W2033202203 hasConceptScore W2033202203C171250308 @default.
- W2033202203 hasConceptScore W2033202203C185592680 @default.
- W2033202203 hasConceptScore W2033202203C19067145 @default.
- W2033202203 hasConceptScore W2033202203C192562407 @default.
- W2033202203 hasConceptScore W2033202203C2779227376 @default.
- W2033202203 hasConceptScore W2033202203C2780026712 @default.
- W2033202203 hasConceptScore W2033202203C2780477314 @default.
- W2033202203 hasConceptScore W2033202203C3792809 @default.
- W2033202203 hasConceptScore W2033202203C42360764 @default.
- W2033202203 hasConceptScore W2033202203C43617362 @default.
- W2033202203 hasConceptScore W2033202203C46275449 @default.
- W2033202203 hasConceptScore W2033202203C520434653 @default.
- W2033202203 hasConceptScore W2033202203C59061564 @default.
- W2033202203 hasIssue "7" @default.
- W2033202203 hasLocation W20332022031 @default.
- W2033202203 hasOpenAccess W2033202203 @default.
- W2033202203 hasPrimaryLocation W20332022031 @default.
- W2033202203 hasRelatedWork W1656208663 @default.
- W2033202203 hasRelatedWork W1975633927 @default.
- W2033202203 hasRelatedWork W1988536844 @default.
- W2033202203 hasRelatedWork W1990956726 @default.
- W2033202203 hasRelatedWork W1996777073 @default.
- W2033202203 hasRelatedWork W2005625273 @default.
- W2033202203 hasRelatedWork W2020765697 @default.
- W2033202203 hasRelatedWork W2317782801 @default.
- W2033202203 hasRelatedWork W2910986511 @default.
- W2033202203 hasRelatedWork W4210256258 @default.
- W2033202203 hasVolume "61" @default.
- W2033202203 isParatext "false" @default.
- W2033202203 isRetracted "false" @default.
- W2033202203 magId "2033202203" @default.
- W2033202203 workType "article" @default.