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• W2033339563 abstract "X-ray mask displacements were simulated using finite element method in order to estimate the requirements for the stress and stress distribution of the absorber and membranes. The structure of X-ray mask in this simulation was as follows: the substrate was 3inch φ and 2mm thick Si wafer, the membranes were 2μm thick SiN and SiC, absorber thickness was 0.5μm, and window area was 25mm square. The simulations were focused on the film stress, various absorber patterns, such as half pattern of window, line and space patterns, and the influence of backetch." @default.
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• W2033339563 date "1996-07-24" @default.
• W2033339563 modified "2023-09-23" @default.
• W2033339563 title "Simulation of x-ray mask displacement by absorber and membrane stress" @default.
• W2033339563 doi "https://doi.org/10.1117/12.245214" @default.
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