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- W2033492028 abstract "We have developed a fabrication process of As 2 S 3 waveguides. The main issues were to find suitable protective layer of As 2 S 3 film from alkaline developer attack and plasma etch chemistry. These developments enable quasi vertical- profiled and small dimension loss waveguides processed with standard photolithographic and plasma etching process." @default.
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- W2033492028 date "2006-12-01" @default.
- W2033492028 modified "2023-09-26" @default.
- W2033492028 title "Advanced processing methods for As<inf>2</inf>S<inf>3</inf> Waveguide Fabrication" @default.
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- W2033492028 doi "https://doi.org/10.1109/commad.2006.4429923" @default.
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