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- W2033518206 abstract "ABSTRACT The knowledge of mechanical properties of materials used in microelectromechanical systems (MEMS)devices is critical not only in designing structures such as cantilevers and beams but also for ensuring theirreliability during operation of these devices. It has been established that the mechanical properties are scale-and-process-dependent, and hence it is essential to measure the mechanical properties of these materials atthe same length scale and using the same process as that used in their usage in MEMS devices. The variousexperimental techniques in vogue to measure the mechanical properties of these materials are briefly reviewed.The facilities established at the Defence Metallurgical Research Laboratory, Hyderabad, and their capabilitiesare also highlighted.Keywords: Mechanical properties, MEMS, microelectromechanical systems, experimental techniques 1. INTRODUCTIONThe past two decades have seen the emergence andrapid growth of microelectromechanical systems (MEMS)as an important area of technology with possible applicationsin defence as well as in the civilian sector. The basicpremise behind the concept of MEMS is that the efficienciesof high volume production and low unit cost achieved bythe microelectronics industry over the past 50 years canbe translated to devices in which the mechanical andelectrical/electronic functions are integrated. In additionto the potential economic benefits, unique capabilitiescan be achieved by such integration to realize devices atvery small scales such as sensors" @default.
- W2033518206 created "2016-06-24" @default.
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- W2033518206 date "2009-11-24" @default.
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- W2033518206 title "Experimental Techniques for the Measurement of Mechanical Properties of Materials Used in Microelectromechanical Systems" @default.
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