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- W2033750498 abstract "In this work, we discuss the development of combinatorial deposition and analysis tools for the investigation of and the optimization of transparent conducting oxides. Library deposition by co-sputtering followed by optical analysis is shown to be a facile way to achieve these goals. Initial work focused on Zn-Al-O libraries with low Al contents as a test case. Subsequent work has focused on the ZnO-SnO2 tie line. Local maxima in the composition dependence of the conductivity were found for Zn/Sn ≈2:1 (Zn2SnO4) and Zn/Sn ≈1:1 (ZnSnO3). For these two representative stoichiometries, constant composition films have also been grown by pulsed laser deposition." @default.
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- W2033750498 date "2002-05-01" @default.
- W2033750498 modified "2023-10-03" @default.
- W2033750498 title "Combinatorial studies of Zn-Al-O and Zn-Sn-O transparent conducting oxide thin films" @default.
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- W2033750498 doi "https://doi.org/10.1016/s0040-6090(02)00205-5" @default.
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