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- W2033766174 abstract "Abstract In order to match shrinking lateral dimensions in ULSI devices, there will be a need to reduce equivalent oxide thicknesses for gate dielectrics to at least 5–6 nm, and perhaps to as thin as ∼3 nm. This reduction will have to be accomplished with low thermal budget, and more-than-likely low temperature processing as well. In this paper the important processing steps required for formation of ultra-thin gate oxides by thin film deposition as contrasted with conventional thermal oxidation, or the emerging technique of rapid thermal oxidation (RTO), are identified. Several different low thermal budget/low-temperature processing alternatives are identified in which interface formation, bulk oxide deposition, and structural and chemical relaxation are performed separately and controlled independently." @default.
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- W2033766174 date "1995-07-01" @default.
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- W2033766174 title "Deposition of ultra-thin oxide dielectrics for MOSFETs by a combination of low-temperature plasma-assisted oxidation, and intermediate and high-temperature rapid thermal processing" @default.
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- W2033766174 doi "https://doi.org/10.1016/0022-3093(95)00112-3" @default.
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