Matches in SemOpenAlex for { <https://semopenalex.org/work/W2033773721> ?p ?o ?g. }
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- W2033773721 endingPage "8587" @default.
- W2033773721 startingPage "8579" @default.
- W2033773721 abstract "The impact of an accelerated cluster ion upon a target surface imparts very high energy densities into the impact area and produces non-linear effects that are not associated with the impacts of atomic ions. These unique characteristics of gas cluster ion (GCIB) bombardment have been found to offer potential for various industrial applications. Prospective applications for these effects include low energy ion implantation, high rate sputtering, surface cleaning and smoothing, and low temperature thin film formation. This paper reviews recent R & D trends of GCIB processes." @default.
- W2033773721 created "2016-06-24" @default.
- W2033773721 creator A5009414859 @default.
- W2033773721 creator A5050316548 @default.
- W2033773721 date "2007-08-01" @default.
- W2033773721 modified "2023-09-26" @default.
- W2033773721 title "Nano-scale surface modification using gas cluster ion beams — A development history and review of the Japanese nano-technology program" @default.
- W2033773721 cites W1643283706 @default.
- W2033773721 cites W1980229172 @default.
- W2033773721 cites W2004851940 @default.
- W2033773721 cites W2047813746 @default.
- W2033773721 cites W2067559675 @default.
- W2033773721 cites W2079456150 @default.
- W2033773721 cites W2100438472 @default.
- W2033773721 cites W2137932321 @default.
- W2033773721 cites W2144753806 @default.
- W2033773721 doi "https://doi.org/10.1016/j.surfcoat.2006.02.081" @default.
- W2033773721 hasPublicationYear "2007" @default.
- W2033773721 type Work @default.
- W2033773721 sameAs 2033773721 @default.
- W2033773721 citedByCount "28" @default.
- W2033773721 countsByYear W20337737212012 @default.
- W2033773721 countsByYear W20337737212013 @default.
- W2033773721 countsByYear W20337737212014 @default.
- W2033773721 countsByYear W20337737212015 @default.
- W2033773721 countsByYear W20337737212016 @default.
- W2033773721 countsByYear W20337737212017 @default.
- W2033773721 countsByYear W20337737212018 @default.
- W2033773721 countsByYear W20337737212019 @default.
- W2033773721 countsByYear W20337737212020 @default.
- W2033773721 countsByYear W20337737212022 @default.
- W2033773721 crossrefType "journal-article" @default.
- W2033773721 hasAuthorship W2033773721A5009414859 @default.
- W2033773721 hasAuthorship W2033773721A5050316548 @default.
- W2033773721 hasConcept C115537861 @default.
- W2033773721 hasConcept C121332964 @default.
- W2033773721 hasConcept C145148216 @default.
- W2033773721 hasConcept C147789679 @default.
- W2033773721 hasConcept C159985019 @default.
- W2033773721 hasConcept C164866538 @default.
- W2033773721 hasConcept C171250308 @default.
- W2033773721 hasConcept C178790620 @default.
- W2033773721 hasConcept C184779094 @default.
- W2033773721 hasConcept C185592680 @default.
- W2033773721 hasConcept C19067145 @default.
- W2033773721 hasConcept C192562407 @default.
- W2033773721 hasConcept C199360897 @default.
- W2033773721 hasConcept C22423302 @default.
- W2033773721 hasConcept C2780357685 @default.
- W2033773721 hasConcept C41008148 @default.
- W2033773721 hasConcept C41823505 @default.
- W2033773721 hasConceptScore W2033773721C115537861 @default.
- W2033773721 hasConceptScore W2033773721C121332964 @default.
- W2033773721 hasConceptScore W2033773721C145148216 @default.
- W2033773721 hasConceptScore W2033773721C147789679 @default.
- W2033773721 hasConceptScore W2033773721C159985019 @default.
- W2033773721 hasConceptScore W2033773721C164866538 @default.
- W2033773721 hasConceptScore W2033773721C171250308 @default.
- W2033773721 hasConceptScore W2033773721C178790620 @default.
- W2033773721 hasConceptScore W2033773721C184779094 @default.
- W2033773721 hasConceptScore W2033773721C185592680 @default.
- W2033773721 hasConceptScore W2033773721C19067145 @default.
- W2033773721 hasConceptScore W2033773721C192562407 @default.
- W2033773721 hasConceptScore W2033773721C199360897 @default.
- W2033773721 hasConceptScore W2033773721C22423302 @default.
- W2033773721 hasConceptScore W2033773721C2780357685 @default.
- W2033773721 hasConceptScore W2033773721C41008148 @default.
- W2033773721 hasConceptScore W2033773721C41823505 @default.
- W2033773721 hasIssue "19-20" @default.
- W2033773721 hasLocation W20337737211 @default.
- W2033773721 hasOpenAccess W2033773721 @default.
- W2033773721 hasPrimaryLocation W20337737211 @default.
- W2033773721 hasRelatedWork W1972192424 @default.
- W2033773721 hasRelatedWork W1975672165 @default.
- W2033773721 hasRelatedWork W1976265802 @default.
- W2033773721 hasRelatedWork W2034536399 @default.
- W2033773721 hasRelatedWork W2052714447 @default.
- W2033773721 hasRelatedWork W2066325085 @default.
- W2033773721 hasRelatedWork W2081257134 @default.
- W2033773721 hasRelatedWork W2332768081 @default.
- W2033773721 hasRelatedWork W3012197531 @default.
- W2033773721 hasRelatedWork W4200161497 @default.
- W2033773721 hasVolume "201" @default.
- W2033773721 isParatext "false" @default.
- W2033773721 isRetracted "false" @default.
- W2033773721 magId "2033773721" @default.
- W2033773721 workType "article" @default.