Matches in SemOpenAlex for { <https://semopenalex.org/work/W2033854524> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2033854524 endingPage "65" @default.
- W2033854524 startingPage "63" @default.
- W2033854524 abstract "Acceleration of thermal donor formation at 400 °C in Czochralski Si by a hydrogen plasma has been observed using low-temperature infrared absorption and spreading resistance probe measurements. The accelerated formation in as-grown Si is attributed to hydrogen diffusion and catalyzed conversion of electrically inactive nuclei to thermal donors. When the nuclei concentration is small such as in rapid thermal annealed Si, hydrogen interaction at SiO bonds is suggested as the rate-limiting step in thermal donor formation." @default.
- W2033854524 created "2016-06-24" @default.
- W2033854524 creator A5019505131 @default.
- W2033854524 creator A5025074111 @default.
- W2033854524 date "1990-01-01" @default.
- W2033854524 modified "2023-10-16" @default.
- W2033854524 title "Hydrogen-accelerated thermal donor formation in Czochralski silicon" @default.
- W2033854524 cites W1968343901 @default.
- W2033854524 cites W1990195154 @default.
- W2033854524 cites W2011319628 @default.
- W2033854524 cites W2040398550 @default.
- W2033854524 cites W2048650446 @default.
- W2033854524 cites W2052031297 @default.
- W2033854524 cites W2065701301 @default.
- W2033854524 cites W4211145342 @default.
- W2033854524 doi "https://doi.org/10.1063/1.102652" @default.
- W2033854524 hasPublicationYear "1990" @default.
- W2033854524 type Work @default.
- W2033854524 sameAs 2033854524 @default.
- W2033854524 citedByCount "54" @default.
- W2033854524 countsByYear W20338545242012 @default.
- W2033854524 countsByYear W20338545242014 @default.
- W2033854524 countsByYear W20338545242016 @default.
- W2033854524 countsByYear W20338545242020 @default.
- W2033854524 crossrefType "journal-article" @default.
- W2033854524 hasAuthorship W2033854524A5019505131 @default.
- W2033854524 hasAuthorship W2033854524A5025074111 @default.
- W2033854524 hasConcept C113196181 @default.
- W2033854524 hasConcept C121332964 @default.
- W2033854524 hasConcept C178790620 @default.
- W2033854524 hasConcept C185592680 @default.
- W2033854524 hasConcept C192562407 @default.
- W2033854524 hasConcept C204530211 @default.
- W2033854524 hasConcept C207521374 @default.
- W2033854524 hasConcept C43617362 @default.
- W2033854524 hasConcept C49040817 @default.
- W2033854524 hasConcept C512968161 @default.
- W2033854524 hasConcept C544956773 @default.
- W2033854524 hasConcept C69357855 @default.
- W2033854524 hasConcept C97355855 @default.
- W2033854524 hasConceptScore W2033854524C113196181 @default.
- W2033854524 hasConceptScore W2033854524C121332964 @default.
- W2033854524 hasConceptScore W2033854524C178790620 @default.
- W2033854524 hasConceptScore W2033854524C185592680 @default.
- W2033854524 hasConceptScore W2033854524C192562407 @default.
- W2033854524 hasConceptScore W2033854524C204530211 @default.
- W2033854524 hasConceptScore W2033854524C207521374 @default.
- W2033854524 hasConceptScore W2033854524C43617362 @default.
- W2033854524 hasConceptScore W2033854524C49040817 @default.
- W2033854524 hasConceptScore W2033854524C512968161 @default.
- W2033854524 hasConceptScore W2033854524C544956773 @default.
- W2033854524 hasConceptScore W2033854524C69357855 @default.
- W2033854524 hasConceptScore W2033854524C97355855 @default.
- W2033854524 hasIssue "1" @default.
- W2033854524 hasLocation W20338545241 @default.
- W2033854524 hasOpenAccess W2033854524 @default.
- W2033854524 hasPrimaryLocation W20338545241 @default.
- W2033854524 hasRelatedWork W1966839245 @default.
- W2033854524 hasRelatedWork W1975314861 @default.
- W2033854524 hasRelatedWork W1995781838 @default.
- W2033854524 hasRelatedWork W2005428137 @default.
- W2033854524 hasRelatedWork W2023486592 @default.
- W2033854524 hasRelatedWork W2051378228 @default.
- W2033854524 hasRelatedWork W2058774120 @default.
- W2033854524 hasRelatedWork W2095233786 @default.
- W2033854524 hasRelatedWork W3011831393 @default.
- W2033854524 hasRelatedWork W2469020371 @default.
- W2033854524 hasVolume "56" @default.
- W2033854524 isParatext "false" @default.
- W2033854524 isRetracted "false" @default.
- W2033854524 magId "2033854524" @default.
- W2033854524 workType "article" @default.