Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034013569> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2034013569 endingPage "601" @default.
- W2034013569 startingPage "595" @default.
- W2034013569 abstract "In this article we describe a newly proposed and consistent damage model in Monte Carlo simulation for the accurate prediction of a three-dimensional as-implanted impurity profile and point defect profile induced by ion implantation in (100) crystal silicon. An empirical electronic energy loss model for B, BF2, As, P, and Si self-implants over a wide energy range has been proposed for silicon-based semiconductor device technology and development. Our model shows very good agreement with secondary ion mass spectrometry data over a wide energy range. For damage accumulation, we have considered the self-annealing effects by introducing our proposed nonlinear recombination probability function of each point defect for computational efficiency. For the damage profiles, we compared the published Rutherford backscattering spectrometry (RBS)/channeling data with our results of phosphorus implants. Our damage model shows very reasonable agreements with the RBS/channeling experiments for phosphorus implants." @default.
- W2034013569 created "2016-06-24" @default.
- W2034013569 creator A5025698811 @default.
- W2034013569 creator A5081724588 @default.
- W2034013569 date "2000-01-01" @default.
- W2034013569 modified "2023-09-27" @default.
- W2034013569 title "Ion implantation damage model for B, BF2, As, P, and Si in silicon" @default.
- W2034013569 cites W1994140501 @default.
- W2034013569 cites W1997277528 @default.
- W2034013569 cites W1999553457 @default.
- W2034013569 cites W2026471767 @default.
- W2034013569 cites W2080042386 @default.
- W2034013569 cites W2133411489 @default.
- W2034013569 doi "https://doi.org/10.1116/1.591238" @default.
- W2034013569 hasPublicationYear "2000" @default.
- W2034013569 type Work @default.
- W2034013569 sameAs 2034013569 @default.
- W2034013569 citedByCount "4" @default.
- W2034013569 crossrefType "journal-article" @default.
- W2034013569 hasAuthorship W2034013569A5025698811 @default.
- W2034013569 hasAuthorship W2034013569A5081724588 @default.
- W2034013569 hasConcept C105795698 @default.
- W2034013569 hasConcept C108225325 @default.
- W2034013569 hasConcept C121332964 @default.
- W2034013569 hasConcept C145148216 @default.
- W2034013569 hasConcept C159985019 @default.
- W2034013569 hasConcept C164675345 @default.
- W2034013569 hasConcept C171250308 @default.
- W2034013569 hasConcept C178790620 @default.
- W2034013569 hasConcept C184779094 @default.
- W2034013569 hasConcept C185592680 @default.
- W2034013569 hasConcept C19067145 @default.
- W2034013569 hasConcept C192562407 @default.
- W2034013569 hasConcept C19499675 @default.
- W2034013569 hasConcept C204323151 @default.
- W2034013569 hasConcept C2777855556 @default.
- W2034013569 hasConcept C2779227376 @default.
- W2034013569 hasConcept C2780547777 @default.
- W2034013569 hasConcept C33923547 @default.
- W2034013569 hasConcept C41823505 @default.
- W2034013569 hasConcept C41999313 @default.
- W2034013569 hasConcept C49040817 @default.
- W2034013569 hasConcept C544956773 @default.
- W2034013569 hasConcept C71987851 @default.
- W2034013569 hasConcept C77671233 @default.
- W2034013569 hasConcept C79635011 @default.
- W2034013569 hasConcept C8010536 @default.
- W2034013569 hasConceptScore W2034013569C105795698 @default.
- W2034013569 hasConceptScore W2034013569C108225325 @default.
- W2034013569 hasConceptScore W2034013569C121332964 @default.
- W2034013569 hasConceptScore W2034013569C145148216 @default.
- W2034013569 hasConceptScore W2034013569C159985019 @default.
- W2034013569 hasConceptScore W2034013569C164675345 @default.
- W2034013569 hasConceptScore W2034013569C171250308 @default.
- W2034013569 hasConceptScore W2034013569C178790620 @default.
- W2034013569 hasConceptScore W2034013569C184779094 @default.
- W2034013569 hasConceptScore W2034013569C185592680 @default.
- W2034013569 hasConceptScore W2034013569C19067145 @default.
- W2034013569 hasConceptScore W2034013569C192562407 @default.
- W2034013569 hasConceptScore W2034013569C19499675 @default.
- W2034013569 hasConceptScore W2034013569C204323151 @default.
- W2034013569 hasConceptScore W2034013569C2777855556 @default.
- W2034013569 hasConceptScore W2034013569C2779227376 @default.
- W2034013569 hasConceptScore W2034013569C2780547777 @default.
- W2034013569 hasConceptScore W2034013569C33923547 @default.
- W2034013569 hasConceptScore W2034013569C41823505 @default.
- W2034013569 hasConceptScore W2034013569C41999313 @default.
- W2034013569 hasConceptScore W2034013569C49040817 @default.
- W2034013569 hasConceptScore W2034013569C544956773 @default.
- W2034013569 hasConceptScore W2034013569C71987851 @default.
- W2034013569 hasConceptScore W2034013569C77671233 @default.
- W2034013569 hasConceptScore W2034013569C79635011 @default.
- W2034013569 hasConceptScore W2034013569C8010536 @default.
- W2034013569 hasIssue "1" @default.
- W2034013569 hasLocation W20340135691 @default.
- W2034013569 hasOpenAccess W2034013569 @default.
- W2034013569 hasPrimaryLocation W20340135691 @default.
- W2034013569 hasRelatedWork W1969656731 @default.
- W2034013569 hasRelatedWork W1989284672 @default.
- W2034013569 hasRelatedWork W1991206968 @default.
- W2034013569 hasRelatedWork W1997428111 @default.
- W2034013569 hasRelatedWork W1999043866 @default.
- W2034013569 hasRelatedWork W2048269824 @default.
- W2034013569 hasRelatedWork W2058979042 @default.
- W2034013569 hasRelatedWork W2068380429 @default.
- W2034013569 hasRelatedWork W3212976177 @default.
- W2034013569 hasRelatedWork W762019970 @default.
- W2034013569 hasVolume "18" @default.
- W2034013569 isParatext "false" @default.
- W2034013569 isRetracted "false" @default.
- W2034013569 magId "2034013569" @default.
- W2034013569 workType "article" @default.