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- W2034016807 abstract "Experiments aimed at the deposition of an intermediate buffer layer between Si and high-Tc superconductor films were undertaken. The results of the preparation of yttria stabilized zirconia (YSZ) thin films by planar rf magnetron sputtering of a mozaic single crystalline target on polished undoped Si(100) substrates are reported. The films were polycrystalline with about a 30 nm grain size and preferentially (100)-oriented in the range of substrate temperatures of 800–880° C. These layers promoted c-axis oriented growth of YBaCuO laser-deposited films. No chemical reactions between the buffer layer and the high-Tc superconductor were observed." @default.
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- W2034016807 date "1992-10-01" @default.
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- W2034016807 title "Radio frequency sputtered ZrO2/Y2O3 (YSZ) buffer layers for YBaCuO deposition on silicon" @default.
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- W2034016807 doi "https://doi.org/10.1016/0042-207x(92)90006-i" @default.
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