Matches in SemOpenAlex for { <https://semopenalex.org/work/W2034047417> ?p ?o ?g. }
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- W2034047417 endingPage "5799" @default.
- W2034047417 startingPage "5799" @default.
- W2034047417 abstract "Ruthenium has been of interest for application in ULSI capacitor electrodes and more recently as a barrier metal against Cu diffusion. Thin-film deposition from supercritical CO 2 has gained particular attention as a new deposition technique that provides nano-penetration capability and a possibility of developing new deposition chemistries. However, few papers have been published on this technique. In this article, first, the deposition characteristics of Ru thin films using H 2 reduction chemistry were described. It was found that Ru films grow only on conductive surfaces when H 2 reduction chemistry was employed. These films can be beneficial for some specific applications; however they are not very much favored for general deposition technology. Second, we report that Ru films, oxygen-containing Ru films in fact, grew on dielectric/non-conductive surfaces when oxidative chemistry was used. O 3 was used as an oxidant for thin film deposition from supercritical fluids for the first time. The use of O 3 promotes heterogenous nucleation and increases the amount of oxygen in the films. Oxygen-containing Ru was reduced by another reduction run using supercritical CO 2 ." @default.
- W2034047417 created "2016-06-24" @default.
- W2034047417 creator A5072728675 @default.
- W2034047417 date "2005-07-01" @default.
- W2034047417 modified "2023-10-17" @default.
- W2034047417 title "Deposition of Ru Thin Films from Supercritical Carbon Dioxide Fluids" @default.
- W2034047417 cites W1998339137 @default.
- W2034047417 cites W2043995121 @default.
- W2034047417 cites W2064389980 @default.
- W2034047417 cites W2066879374 @default.
- W2034047417 cites W2067189528 @default.
- W2034047417 cites W2077886792 @default.
- W2034047417 cites W2083310674 @default.
- W2034047417 cites W2084705644 @default.
- W2034047417 cites W2087687622 @default.
- W2034047417 cites W2144410113 @default.
- W2034047417 cites W2160746755 @default.
- W2034047417 cites W2168342646 @default.
- W2034047417 doi "https://doi.org/10.1143/jjap.44.5799" @default.
- W2034047417 hasPublicationYear "2005" @default.
- W2034047417 type Work @default.
- W2034047417 sameAs 2034047417 @default.
- W2034047417 citedByCount "44" @default.
- W2034047417 countsByYear W20340474172012 @default.
- W2034047417 countsByYear W20340474172013 @default.
- W2034047417 countsByYear W20340474172014 @default.
- W2034047417 countsByYear W20340474172015 @default.
- W2034047417 countsByYear W20340474172017 @default.
- W2034047417 countsByYear W20340474172018 @default.
- W2034047417 countsByYear W20340474172019 @default.
- W2034047417 countsByYear W20340474172020 @default.
- W2034047417 countsByYear W20340474172021 @default.
- W2034047417 crossrefType "journal-article" @default.
- W2034047417 hasAuthorship W2034047417A5072728675 @default.
- W2034047417 hasConcept C118419359 @default.
- W2034047417 hasConcept C127413603 @default.
- W2034047417 hasConcept C134458231 @default.
- W2034047417 hasConcept C151730666 @default.
- W2034047417 hasConcept C161790260 @default.
- W2034047417 hasConcept C171250308 @default.
- W2034047417 hasConcept C178790620 @default.
- W2034047417 hasConcept C179104552 @default.
- W2034047417 hasConcept C185592680 @default.
- W2034047417 hasConcept C19067145 @default.
- W2034047417 hasConcept C192562407 @default.
- W2034047417 hasConcept C2816523 @default.
- W2034047417 hasConcept C42360764 @default.
- W2034047417 hasConcept C555196967 @default.
- W2034047417 hasConcept C61048295 @default.
- W2034047417 hasConcept C64297162 @default.
- W2034047417 hasConcept C75937256 @default.
- W2034047417 hasConcept C86803240 @default.
- W2034047417 hasConceptScore W2034047417C118419359 @default.
- W2034047417 hasConceptScore W2034047417C127413603 @default.
- W2034047417 hasConceptScore W2034047417C134458231 @default.
- W2034047417 hasConceptScore W2034047417C151730666 @default.
- W2034047417 hasConceptScore W2034047417C161790260 @default.
- W2034047417 hasConceptScore W2034047417C171250308 @default.
- W2034047417 hasConceptScore W2034047417C178790620 @default.
- W2034047417 hasConceptScore W2034047417C179104552 @default.
- W2034047417 hasConceptScore W2034047417C185592680 @default.
- W2034047417 hasConceptScore W2034047417C19067145 @default.
- W2034047417 hasConceptScore W2034047417C192562407 @default.
- W2034047417 hasConceptScore W2034047417C2816523 @default.
- W2034047417 hasConceptScore W2034047417C42360764 @default.
- W2034047417 hasConceptScore W2034047417C555196967 @default.
- W2034047417 hasConceptScore W2034047417C61048295 @default.
- W2034047417 hasConceptScore W2034047417C64297162 @default.
- W2034047417 hasConceptScore W2034047417C75937256 @default.
- W2034047417 hasConceptScore W2034047417C86803240 @default.
- W2034047417 hasIssue "7S" @default.
- W2034047417 hasLocation W20340474171 @default.
- W2034047417 hasOpenAccess W2034047417 @default.
- W2034047417 hasPrimaryLocation W20340474171 @default.
- W2034047417 hasRelatedWork W1975709790 @default.
- W2034047417 hasRelatedWork W2034047417 @default.
- W2034047417 hasRelatedWork W2055338865 @default.
- W2034047417 hasRelatedWork W2087682438 @default.
- W2034047417 hasRelatedWork W2292660899 @default.
- W2034047417 hasRelatedWork W2334308812 @default.
- W2034047417 hasRelatedWork W2954904842 @default.
- W2034047417 hasRelatedWork W3113426665 @default.
- W2034047417 hasRelatedWork W3148686469 @default.
- W2034047417 hasRelatedWork W832514802 @default.
- W2034047417 hasVolume "44" @default.
- W2034047417 isParatext "false" @default.
- W2034047417 isRetracted "false" @default.
- W2034047417 magId "2034047417" @default.
- W2034047417 workType "article" @default.