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- W2034105788 abstract "Abstract We report on the first peristaltic micropump with active microvalves actuated by piezoelectric thin-films. We developed an original process to combine state of the art sol-gel Pb(Zr,Ti)O3 (PZT) thin-films with a highly performing silicon micropump. The device thus takes advantage of both technologies, especially with respect to low voltage actuation and high precision. It can produce μl/min flows for 24 V actuation voltage, opening a new range of applications for low consuming pumps and autonomous microfluidic systems, especially implanted devices for drug delivery." @default.
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- W2034105788 date "2014-01-01" @default.
- W2034105788 modified "2023-09-25" @default.
- W2034105788 title "Piezoelectric Micro-pump with PZT Thin Film for Low Consumption Microfluidic Devices" @default.
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- W2034105788 doi "https://doi.org/10.1016/j.proeng.2014.11.402" @default.
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