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• W2034147237 abstract "Precision f/1 microlenses have been fabricated in GaP by smoothing a multiple-mesa structure etched with a designed width and length variation. High-resolution lithography and ion-beam- assisted etching were used for mesa definition and resulted in accurate lens profiles after mass-transport smoothing at 900–1070 °C. This much simplified fabrication technique is highly promising for efficient, diffraction-limited micro-optical elements." @default.
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• W2034147237 date "1994-03-21" @default.
• W2034147237 modified "2023-09-26" @default.
• W2034147237 title "Large-numerical-aperture microlens fabrication by one-step etching and mass-transport smoothing" @default.
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• W2034147237 doi "https://doi.org/10.1063/1.111892" @default.
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